Optical control device and method for making the same
AssigneeNEC Corporation
InventorsHiroshi Nishimoto, Toshiyuki Kambe
Life of this patent
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Abstract
Disclosed is an optical control device which has a LiNbO3 or LiTaO3 crystalline substrate having electrooptic effect; a channel-type optical waveguide which is formed in the crystalline substrate by doping metal; an optically transparent film layer formed on the crystalline substrate; and electrodes formed on the optically transparent film layer; wherein the crystalline substrate has a surface except a region which waveguided-light through the channel-type optical waveguide propagates or an entire surface under which a layer doped by metal is formed.
Claims18
An optical control device, comprising:
- a crystalline substrate comprising lithium containing material, and having electrooptic effect;
- a channel-type optical waveguide which is formed in said crystalline substrate by doping metal;
- an optically transparent film layer formed on said crystalline substrate;
- and
- electrodes formed on said optically transparent film layer;
- wherein a layer doped by metal is formed on at least a portion of a surface of said crystalline substrate outside of a region where waveguided-light through said channel-type optical waveguide propagates.
An optical control device, comprising:
- a crystalline substrate comprising one of LiNbO.sub.3 and LiTaO.sub.3, and having electrooptic effect;
- a channel-type optical waveguide which is formed in said crystalline substrate by proton exchange;
- an optically transparent film layer formed on said crystalline substrate;
- and
- electrodes formed on said optically transparent film layer;
- wherein a layer doped by metal is formed on at least a portion of a surface of said crystalline substrate outside of a region where waveguided-light through said channel-type optical waveguide propagates.
A method for making an optical control device, comprising the steps of:
- providing a LiNbO3 crystalline substrate;
- and
- forming simultaneously a channel-type optical waveguide which is formed in said crystalline substrate by doping metal, and a layer under at least a portion of a surface of said crystalline substrate outside of a region where waveguided-light is meant to propagate through said channel-type optical waveguide, said layer being formed by doping metal, using a thermal diffusion technique.
A method for making an optical control device, comprising the steps of:
- providing a LiNbO3 crystalline substrate;
- forming a channel-type optical waveguide in said crystalline substrate by doping metal using a thermal diffusion technique;
- and
- separately forming a layer under at least a portion of a surface of said crystalline substrate outside of a region where waveguided-light is meant to propagate through said channel-type optical waveguide, said layer being formed by doping metal, using a thermal diffusion technique.
An optical control device, comprising:
- a crystalline substrate having electrooptic effect which is made of a lithium-containing material;
- a channel-type optical waveguide which is formed in said crystalline substrate;
- a first film layer which is optically transparent and formed on said crystalline substrate;
- a second film layer which is formed between said crystalline substrate and said first film layer and is positioned in an area outside of a region where waveguided-light through said channel-type optical waveguide propagates, said second film layer being made of a material different from that of said crystalline substrate and said first film layer;
- and
- electrodes, said electrodes being formed on said first film layer.
A method for making an optical control device, comprising the steps of:
- providing a crystalline substrate having electrooptic effect which is made of a lithium-containing material;
- forming a channel-type optical waveguide in said crystalline substrate;
- forming a first film layer on said crystalline substrate so that said first film layer is positioned outside of a region where waveguide-light is meant to propagate through said channel-type optical waveguide;
- and
- forming a second film layer which is optically transparent on said second film layer.
A method for making an optical control device, comprising the steps of:
- providing a crystalline substrate having electrooptic effect which is made of a lithium-containing material;
- forming a channel-type optical waveguide in said crystalline substrate;
- forming a first film layer on said crystalline substrate;
- forming a second film layer which is optically transparent on said second film layer;
- and
- removing at least a part of said first and second film layers over a region where waveguided-light is meant to propagate through said channel-type optical waveguide.
Dependencies are inferred from the claim text.