US 5,686,711 A · Semiconductor acceleration sensor

Abstract

A highly reliable semiconductor acceleration sensor in which the amplification of the oscillation of the cantilever beam does not become large and break the beam. The semiconductor acceleration sensor has a beam support provided on a circuit substrate and a flexible acceleration detection beam deflecting according with the applied acceleration. An adhesive is disposed between the beam support and the acceleration detection beam. The semiconductor acceleration sensor has a sensor element for converting the deflection of the acceleration detection beam into an electrical signal. The natural oscillation frequency of the support section, formed by the adhesive and a root section of the beam which is fixed to the adhesive and the resonance frequency of the acceleration detection beam section extending from the root section do not overlap.

Claims4

Dependent claims

A semiconductor acceleration sensor comprising:

a circuit substrate;
a beam support provided on said circuit substrate;
a flexible acceleration detection beam that deflects in response to acceleration;
an adhesive between and bonding said beam support to said acceleration detection beam;
and
a sensor element on said acceleration detection beam for converting deflection of said acceleration detection beam into an electrical signal wherein a support section including said adhesive and a root section of said acceleration detection beam, fixed by said adhesive to said support section, has a natural oscillation frequency, and a section of said acceleration detection beam extending from said root section has a resonance frequency range that does not include the natural oscillation frequency.

3 more elements

Dependencies are inferred from the claim text.

Semiconductor acceleration sensor

Life of this patent

Semiconductor acceleration sensor

Life of this patent

Abstract

Claims4