Method of manufacturing a device, by which method various parts of a body are brought into a pattern
AssigneeU.S. Philips Corporation
InventorAntonius J. M. Nellissen
Life of this patent
Estimating the term…
Abstract
A method of manufacturing a device provided with a body with a surface, at least a portion of the surface being provided with a radiation-sensitive layer, after which portions of the radiation-sensitive layer are exposed to radiation through a mask, a first portion of the layer being irradiated directly using a first part of a radiation beam projected through the mask and a second portion of the layer being irradiated indirectly using a second part of the radiation beam projected through the mask and reflected onto the second portion, the radiation beam being substantially collimated.
Claims9
A method of manufacturing a device provided with a body having a surface, at least a portion of the surface having a radiation-sensitive layer, the method comprising positioning a mask relative to the surface and irradiating first and second portions of the radiation-sensitive layer through the positioned mask using substantially collimated radiation, said first portion of the radiation-sensitive layer being irradiated directly through the positioned mask using a first part of the radiation, and said second portion of the radiation-sensitive layer being irradiated indirectly through the positioned mask using a second part of the radiation, said second part being incident on the second portion after reflection from a reflector, said first and second portions of the radiation-sensitive layer being provided on an upper and an opposed lower side of the body, while the mask is adjacent one of said sides and the reflector is disposed in association with the other of said sides, the radiation being incident on the mask and on the reflector at an angle.
Dependencies are inferred from the claim text.