Ceramic substrate with thin-film capacitor and method of producing the same
AssigneeNgk Spark Plug Co., Ltd.
InventorsToshitaka Hayakawa, Shinobu Yoshida, Toshikatsu Takada
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Abstract
In a ceramic substrate with a thin-film capacitor, having a ceramic substrate a lower electrode layer formed on the ceramic substrate, a dielectric layer formed on the lower electrode layer and made of an oxide of a material constituting the lower electrode layer, and an upper electrode layer formed on the dielectric layer, a plating layer is provided between the ceramic base and the lower electrode layer to serve as a basis for the lower electrode layer.
Claims20
A ceramic substrate with a thin-film capacitor, comprising:
- a ceramic substrate;
- a lower electrode base layer which is a metallic electroplating or electroless plating layer, formed on said ceramic substrate;
- a lower electrode layer formed on said lower electrode base layer;
- a dielectric layer formed on said lower electrode layer and made of an oxide of a material constituting said lower electrode layer;
- and
- an upper electrode layer formed on said dielectric layer.
A method of producing a ceramic substrate with a thin-film capacitor, comprising the steps of:
- forming by metallic electroplating or electroless plating a lower electrode base layer on a ceramic substrate;
- forming a thin-film on said lower electrode base layer;
- processing a surface portion of said thin-film by an oxidizing process to form a dielectric layer whilst allowing a remaining portion of said thin-film to be formed into a lower electrode layer;
- and
- forming an upper electrode layer on said dielectric layer.
A ceramic substrate with a thin-film capacitor comprising:
- a ceramic substrate;
- a lower electrode base layer which is a metallic electroplating or electroless plating layer, formed on said ceramic substrate;
- a lower electrode layer formed on said lower electrode base layer;
- said lower electrode layer having an oxidized surface section constituting a dielectric layer;
- and
- an upper electrode layer formed on said dielectric layer.
Dependencies are inferred from the claim text.