Wafer handler having a flexible pad
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJin Tu Wong, Tzoung-Gann Cheng
Life of this patent
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Abstract
An improved wafer handler having a wafer chuck that properly picks up wafers from a wafer track of an ion implant machine is provided. The wafer handler comprises: an input arm having a wafer chuck and a wafer pad adjustably mounted to the wafer chuck. The wafer pad preferably has an oval shape. The wafer handler can pick up a horizontal wafer and set the wafer down on an angled surface. The oval shape, dimensions, flexible material and mounting screws of the wafer pad enable the pad to form a vacuum with the wafer and to properly handle the wafer. The wafer handler and wafer pad greatly reduce wafer breakage and damage to the implant machine from the broken wafers.
Claims21
A wafer handler, said wafer handler having an input arm, a wafer chuck and a wafer pad, comprising:
- a wafer handler having an input arm;
- said input arm attached to a wafer chuck;
- a wafer pad adjustably mounted to said wafer chuck;
- and said wafer pad formed of a flexible material and having an oval shape, said wafer pad having a height;
- and
- a screw adjusting means for adjusting said height of said wafer pad.
A wafer chuck for a wafer handler comprising:
- a wafer pad adjustably mounted to said wafer chuck by two adjustment screws;
- said wafer pad having an inside portion;
- said two adjustment screws adjust the height of said wafer pad by pressing down on said inside portion of said wafer pad;
- said wafer pad having an oval shape;
- said wafer pad formed of a plastic material;
- whereby said wafer handler can move said wafer pad under a horizontal wafer and pivot said wafer pad up under said wafer to pick up said wafer and deliver said wafer to an angled surface.
A wafer pad for a wafer chuck on a wafer handler for an ion implant machine comprising:
- a wafer pad adjustably mounted to said wafer chuck by two adjustment screws;
- said adjustment screws having heads;
- said heads contacting said wafer pad;
- said wafer pad having an oval shape;
- said wafer pad formed from a plastic material;
- said wafer pad having a thickness in the range of between about 1.8 and 2.2 mm and a width in the range of between about 3.8 and 4.2 mm and a long outer radius in the range of between about 8.8 and 9.2 mm;
- and a short outer radius in the range of between about 6.8 and 7.2 mm;
- whereby said wafer handler can move said wafer pad under a horizontal wafer and pivot said wafer pad up under said wafer to pick up said wafer and deliver said wafer to an angled surface;
- said wafer having a diameter in the range between about 4 to 8 inches.
A wafer handler for an ion implant machine, said wafer handler having an input arm, a wafer chuck and a wafer pad, comprising:
- a wafer handler having an input arm;
- said input arm attached to a wafer chuck;
- a wafer pad adjustably mounted to said wafer chuck;
- and said wafer pad formed of a flexible material and having an oval shape, said wafer pad is adjustably mounted to said wafer chuck by two adjustment screws, said adjustment screws having heads;
- said heads contacting said wafer pad.
A wafer chuck for a wafer handler comprising:
- a wafer pad adjustably mounted to said wafer chuck by two adjustment screws;
- said wafer pad having an oval shape;
- said wafer pad formed of a plastic material, said adjustment screws having heads;
- and said heads contacting said wafer pad;
- whereby said wafer handler can move said wafer pad under a horizontal wafer and pivot said wafer pad up under said wafer to pick up said wafer and deliver said wafer to an angled surface.
Dependencies are inferred from the claim text.