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US 5,685,232 AGranted
Positioning stage device exposure apparatus and device manufacturing method utilizing the same
AssigneeCanon Kabushiki Kaisha
InventorMitsuru Inoue
Life of this patent
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Abstract
A positioning stage device capable of regulating in a wide range the rotational angle of a Z-stage supporting a suction chuck. The suction chuck is constructed integrally with the Z-stage, which is supported by a bearing so as to be movable along the Z-axis and rotatable about the Z-axis. A rotation stopper plate integral with the Z-stage is supported on both faces by bearing pads of an air bearing supported by a rotary ring, and is rotated about the Z-axis together with the air bearing by means of a motor, whereby the rotational angel of the Z-stage is regulated.
Claims7
A positioning stage device comprising:
- a stage rotatable about an axis;
- a rotation stopper member rotatable integrally with said stage;
- restraint means, including a bearing, for restraining rotation of said rotation stopper member about said axis within a predetermined minute range;
- and
- drive means for rotating said restraint means about said axis in a range wider than said predetermined minute range,
- whereby said stage is roughly positioned by the rotation of said restraint means by said drive means, and then positioned finely within the predetermined minute range defined by said restraint means.
3 more elements
Dependencies are inferred from the claim text.