Apparatus for cleaning and drying hard disk substrates

An apparatus for cleaning and then drying hard disk substrates, comprising:

• a first index table intermittently rotatable about a first axis;
• a second index table intermittently rotatable about a second axis;
• at least three first substrate carriers, disposed on said first index table and circumferentially spaced at equal angular intervals, for carrying and transferring a plurality of hard disk substrates;
• and
• at least three second substrate carriers, disposed on said second index table and circumferentially spaced at equal angular intervals, for carrying and transferring a plurality of hard disk substrates,
• wherein, upon rotation of said first index table, said first substrate carriers move successively through a first substrate mounting position in which a hard disk substrate is mounted on one of said first substrate carriers, a substrate cleaning position in which a hard disk substrate mounted on one of said first substrate carriers at said first substrate mounting position is cleaned, and a first substrate removing position in which a hard disk substrate cleaned at said substrate cleaning position is removed from one of said first substrate carriers, and
• wherein upon rotation said second index table, said second substrate carriers move successively through a second substrate mounting position in which a hard disk substrate removed from said first substrate removing position is mounted on one of said second substrate carriers, a substrate drying position in which a hard disk substrate mounted on one of said second substrate carriers at said second substrate mounting position is dried, and a second substrate removing position in which a hard disk substrate dried at said substrate drying position is removed from one of said second substrate carriers.