Method of growing semiconductor crystal

A method of semiconductor crystallization, comprising:

• a characteristic determining step of applying by an optical system a first crystallizing energy to plural loci of an amorphous semiconductor thin film to form a single crystal nucleus in at least one locus of said plural loci, said loci being at intervals to determine a size of an area so as to form a single crystal on the area;
• a film forming step of forming an amorphous semiconductor thin film on a surface of a substrate;
• and
• a crystallizing step of applying a second crystallizing energy to said amorphous semiconductor thin film to grow the crystal of said amorphous semiconductor thin film from the crystal nucleus formed by said first crystallizing energy step;
• wherein the grain size of each crystal nucleus formed by said first crystallizing energy step is 0.5 to 5 times as large as the thickness of said amorphous semiconductor thin form, and the interval of said loci to which said first crystallizing energy is applied is 3 .mu.m or less.

A method of semiconductor crystallization, comprising:

• a film forming step of forming amorphous semiconductor thin film on a surface of a substrate;
• a first step of applying by an optical system a first crystallizing energy to said amorphous semiconductor thin film to form crystal nuclei, said optical system providing to said thin film, multiple beams of laser light having a spacial intensity distribution shaped by interference;
• a second step of applying a second crystallizing energy to said amorphous semiconductor thin film to grow a crystal of said amorphous semiconductor thin film, wherein
• said first step consists of applying the first crystallization energy to form the crystal nuclei at desired different intervals on said amorphous semiconductor thin film, and
• said second step consists of applying the second crystallization energy to grow semiconductor crystals from the crystal nuclei having different sizes formed by said first step wherein said semiconductor crystals having different crystal grain sizes are formed.