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US 5,683,824 AGranted
Coated ceramic member and process for production thereof
AssigneeNGK Insulators, Ltd.
InventorsHiromichi Kobayashi, Tomonori Takahashi, Yutaka Furuse, Yoshiaki Matsushita
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Abstract
A coated ceramic member includes a silicon nitride- or silicon carbide-based ceramic base material, a silicon nitride or silicon carbide film formed on the base material by CVD, and an oxide film formed on the film of CVD, and a process for producing the ceramic-coated member. This coated ceramic member maintains excellent durability under severe conditions, for example, in a high-speed combustion gas.
Claims2
A coated ceramic member comprising:
- a silicon nitride- or silicon carbide-based ceramic base material,
- a silicon nitride or silicon carbide film formed on the base material by CVD, and
- an oxide film formed on said film of CVD.
Dependencies are inferred from the claim text.