Ultra high vacuum broad band high power microwave window
AssigneeSoutheastern Universities Research Ass., Inc.
InventorsViet Nguyen-Tuong, Henry Frederick Dylla, III
Life of this patent
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Abstract
An improved high vacuum microwave window has been developed that utilizes high density polyethylene coated on two sides with SiOx, SiNx, or a combination of the two. The resultant low dielectric and low loss tangent window creates a low outgassing, low permeation seal through which broad band, high power microwave energy may be passed. No matching device is necessary and the sealing technique is simple. The features of the window are broad band transmission, ultra-high vacuum compatibility with a simple sealing technique, low voltage standing wave ratio, high power transmission and low cost.
Claims9
An ultra-high vacuum microwave window comprising:
- a plate of high density polymer with a dielectric constant less than 2.5 and having an inner face and an outer face,
- a layer on at least one of said inner face or said outer face of said plate of high density polymer forming a gas impermeable coating, and
- a first flange and a second flange sandwiching said plate of high density polymer and said layer therebetween with sufficient pressure to create a vacuum seal with said flanges exposed to a low pressure on one side and a higher pressure on the other side with said first flange milled out with a recessed area to accommodate said plate of high density polymer and said second flange having a flat facing side to buttress said plate of said high density polymer.
A method of providing a microwave window including the following steps:
- providing a plate of high density polymer having a dielectric constant of less than 2.5 and coated on at least one side with a gas impermeable coating that is transparent to microwave energy;
- providing two complimentary flanges one of which has a flat recessed area and the other a flat area having a continuous closed sealing ridge;
- and
- tightening said complementary flanges together with said plate sandwiched therebetween to act as a sealing gasket and window as said ridge is imbedded into said plate.
Dependencies are inferred from the claim text.