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US 5,683,560 AGranted
Cathode assembly
AssigneeBalzers und Leybold Deutschland Holding AG
InventorsJoachim Szczyrbowski, Dietmar Marquardt
Life of this patent
Estimating the term…
Abstract
A magnetic yoke (22,23) carrying rows of permanent magnets (33,34) and a target (49,50) is connected to a top plate (41,42) by spring bolts (67) which urge the yoke toward the top plate. Rotatable cams (43,44) between the top plate and the yoke are used to adjust the distance between the top plate and the yoke. Clamping bars (37,38) having a claw-like edge parts (59-66) limit the maximum distance and, in a preferred embodiment, hold the target against the yoke.
Claims6
Cathode sputtering apparatus comprising
- a magnetic yoke which carries permanent magnets and a target,
- a top plate extending parallel to said yoke to form an assembly having parallel sides,
- spring means urging said magnetic yoke toward said top plate,
- rotatable cam means between said top plate and said yoke, said rotatable cam means being effective to move the top plate and the magnetic yoke away from each other against the urging of the spring means, thereby to adjust the distance between said top plate and said yoke when rotated, and
- bracket means effective to limit the movement of the magnetic yoke away from said top plate.
2 more elements
Dependencies are inferred from the claim text.