Process for producing single crystals
AssigneeSumitomo Sitix Corporation
InventorsKaoru Kuramochi, Setsuo Okamoto
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AssigneeSumitomo Sitix Corporation
InventorsKaoru Kuramochi, Setsuo Okamoto
Estimating the term…
A process for producing single crystals with little OSF generation and excellent dielectric strength of gate oxide films by adjusting the temperature gradient of the silicon single crystal in the direction of pulling. The process is carried out with an apparatus including a crucible which contains the melt of the single crystal material, a heating element which heats the melt, a pulling shaft to grow the single crystal, a protective gas inlet pipe, and a chamber which contains all above mentioned components. In addition, the apparatus is provided with a circular cylinder or a conical shaped heat resistant and heat insulating component below the protective gas inlet pipe. In the process of producing single crystals, the single crystal is pulled up through the circular cylinder or conical shaped heat resistant and heat insulating component below the protective gas inlet pipe, and while the pulled-up crystal is at high temperature the temperature gradient is held small and when the crystal is cooled to low temperature the temperature gradient is increased.
In a process of producing single crystals by pulling up a single crystal from a melt of material of said single crystal in a crucible surrounded by a heating element outside said crucible through a heat resistant and heat insulating component connected to a lower part of a protective gas inlet pipe above said melt, the process is characterized by maintaining a small temperature gradient in a high temperature portion of a grown single crystal pulled from the melt and by maintaining a large temperature gradient in a low temperature portion of said grown single crystal.
In a process of producing single crystals by pulling up a single crystal from a melt of material of said single crystal in a crucible surrounded by a heating element outside said crucible through a heat resistant and heat insulating component connected to a lower part of a protective gas inlet pipe above said melt, the process is characterized by maintaining a small temperature gradient in a high temperature portion of a grown single crystal pulled from the melt and by maintaining a large temperature gradient in a low temperature portion of said grown single crystal, the protective gas inlet pipe being characteristically tightly connected to the inside surface of the water cooled chamber.
A method of producing single crystals in an apparatus comprising a chamber containing a crucible for containing a melt from which a single crystal is grown, a heating element for heating the melt, a pulling mechanism for growing the single crystal after contacting the melt with a seed crystal, a protective gas inlet pipe arranged to release heat by thermal conduction with the chamber, the protective gas inlet pipe extending downwardly into the chamber and surrounding the pulling mechanism, supporting components on a lower end of the protective gas inlet pipe, and a heat resistant and heat insulating component supported on the lower end of the protective gas inlet pipe by the supporting components, the heat resistant and heat insulating component surrounding a pulling zone of the single crystal above the melt in the crucible, the method comprising:
A method of producing single crystals in an apparatus comprising a chamber containing a crucible for containing a melt from which a single crystal is grown, a heating element for heating the melt, a pulling mechanism for growing the single crystal after contacting the melt with a seed crystal, a protective gas inlet pipe arranged to release heat by thermal conduction with the chamber, the protective gas inlet pipe extending downwardly into the chamber and surrounding the pulling mechanism, supporting components on a lower end of the protective gas inlet pipe, and a heat resistant and heat insulating component supported on the lower end of the protective gas inlet pipe by the supporting components, the heat resistant and heat insulating component surrounding a pulling zone of the single crystal above the melt in the crucible, the method comprising:
A method of producing single crystals in an apparatus comprising a chamber containing a crucible for containing a melt from which a single crystal is grown, a heating element for heating the melt, a pulling mechanism for growing the single crystal after contacting the melt with a seed crystal, a protective gas inlet pipe arranged to release heat by thermal conduction with the chamber, the protective gas inlet pipe extending downwardly into the chamber and surrounding the pulling mechanism, supporting components on a lower end of the protective gas inlet pipe, and a heat resistant and heat insulating component supported on the lower end of the protective gas inlet pipe by the supporting components, the heat resistant and heat insulating component surrounding a pulling zone of the single crystal above the melt in the crucible, the method comprising:
Dependencies are inferred from the claim text.