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US 5,683,480 AGranted
Method of bonding two prisms with a hydrolysis product
AssigneeCanon Kabushiki Kaisha
InventorYasushi Taniguchi
Life of this patent
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Abstract
A method of manufacturing an optical element which is a beam splitter. A first and a second prism, the second prism having a beam splitting film formed on the surface, are contacted together with the hydrolysis product of a metal or silicon alcoholate, thereby forming a bond of the hydrolysis product of the alcoholate between the first and second prism.
Claims3
A method of manufacturing a beam splitter used in an ultraviolet range comprising the steps of:
- (a) selecting a first prism made of silica;
- (b) selecting a second prism made of silica;
- (c) forming a beam splitting film for transmission in the ultraviolet range on a surface of said second prism, wherein an ultraviolet light is split into two ultraviolet components;
- (d) providing a hydrolysis product of a silicon alcoholate, said hydrolysis product comprising a silicon oxide and a volatizable liquid;
- and
- (e) contacting said first and second prisms with said hydrolysis product of the silicon alcoholate in a space between said first and second prisms, said hydrolysis product being injected into said space between said first and second prisms by capillary action, thereby joining said first and second prisms by forming a bond of said silicon oxide in said space between said first and second prisms, wherein said volatizable liquid volatizes, thereby promoting said bond formation.
3 more elements
A method of manufacturing a beam splitter used in an ultraviolet range comprising the steps of:
- (a) selecting a first prism made of silica;
- (b) selecting a second prism made of silica;
- (c) forming a beam splitting film for transmission in the ultraviolet range on a surface of said second prism, wherein an ultraviolet light is split into two ultraviolet components, wherein said beam splitting film comprises a plurality of layers, a top one of said layers being SiO.sub.2 ;
- (d) providing a hydrolysis product of a silicon alcoholate, said hydrolysis product comprising a silicon oxide and a volatizable liquid;
- and
- (e) contacting said first and second prisms with said hydrolysis product of the silicon alcoholate in a space between said first and second prisms thereby joining said first and second prisms by forming a bond of said silicon oxide in said space between said first and second prisms, wherein said volatizable liquid volatizes, thereby promoting said bond formation.
3 more elements
Dependencies are inferred from the claim text.