Method for manufacturing flat cold cathode arrays
AssigneeIndustrial Technology Research Institute
InventorsNanchou David Liu, Jammy Chin-Ming Huang, Ching-Sung Chiu
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Abstract
Several methods for manufacturing field emission displays that operate using flat cone emitters are described. These methods are cost effective and relatively simple to implement. A key feature is the incorporation of chemical-mechanical polishing into the process. This allows the micro-cones, that would serve as cold cathodes in conventional structures, to be converted to flat cone emitters at the same time that the gate lines are being formed, the apexes of said flat cones being automatically located at the correct height relative to the gate lines.
Claims10
A method for manufacturing a cold cathode array comprising:
- providing an insulating substrate having an upper surface;
- forming cathode columns on the upper surface of said substrate;
- providing cone-shaped microtips, evenly spaced, on said cathode columns;
- coating said cathode columns and said microtips with a conformal insulating layer;
- coating said conformal insulating layer with a conformal conductive layer;
- removing material from said insulating and said conductive layers, in a plane parallel to said upper surface of said substrate, until said cone-shaped microtips have been formed into conical frustra having flat circular apexes;
- and
- then patterning and etching said conductive layer to form gate lines.
Dependencies are inferred from the claim text.