High purity composite useful as furnace components
AssigneeHitco Technologies Inc.
InventorRobert Howard Metter
Life of this patent
Estimating the term…
Abstract
A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy. A process for producing the components includes heat treatment of the carbon fiber and the components.
Claims38
A high purity composite comprising a carbon fiber reinforced carbon matrix having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy for the metals Ag, Al, Ba, Be, Ca, Cd, Co, Cr, Cu, K, Mg, Mn, Mo, Na, Ni, P, Pb, Sr and Zn;
- wherein the carbon fiber is selected from the group consisting of fiber, cloth, woven fabric, yarn, and tape;
- the high purity composite having an ultimate tensile strength of about 25 to about 100 ksi and a tensile modulus of about 3 to about 30 msi, and having a flexural strength of about 15 to about 60 ksi and a compressive strength of about 10 to about 50 ksi.
A Czochralski process furnace component comprising a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy for the metals Ag, Al, Ba, Be, Ca, Cd, Co, Cr, Cu, K, Mg, Mn, Mo, Na, Ni, P, Pb, Sr and Zn;
- wherein the carbon fiber is selected from the group consisting of fiber, cloth, woven fabric, yarn, and tape;
- the high purity composite having an ultimate tensile strength of about 25 to about 100 ksi and a tensile modulus of about 3 to about 30 msi, and having flexural strength of about 15 to about 60 ksi and a compressive strength of about 10 to about 50 ksi.
Dependencies are inferred from the claim text.