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US 5,683,173 AGranted
Cooling chamber for a rapid thermal heating apparatus
AssigneeApplied Materials, Inc.
InventorsChristian M. Gronet, James F. Gibbons
Life of this patent
Estimating the term…
Abstract
A rapid thermal heating apparatus including an evacuable chamber, a plurality of radiant energy sources, reflectors associated with the radiant energy sources, and a cooling passageway adapted to include a coolant to cool the reflectors.
Claims5
A heat source for heating a substrate during rapid thermal processing, comprising:
- a plurality of radiant energy sources;
- a plurality of light pipes associated with said radiant energy sources, said light pipes serving to direct radiant energy from said radiant energy sources to said substrate to radiate predetermined areas of said substrate with a pattern of radiation intensity, said light pipes and said radiant energy sources being positioned so that a portion of a predetermined radiated area of one radiant energy source overlaps a portion of a predetermined radiated area of another radiated energy source;
- and
- a cooling chamber having an upper wall and a lower wall joined together by another wall, said cooling chamber adapted to include a coolant, said light pipes extending into said cooling chamber.
1 more element
An apparatus for the rapid thermal processing of a substrate, comprising:
- an evacuable chamber having a window;
- a plurality of radiant energy sources disposed outside of said chamber and positioned adjacent to said window, said radiant energy sources having a central longitudinal axis that extends in a substantially perpendicular direction relative to said window;
- reflectors associated with said radiant energy sources to direct radiant energy through said window to radiate predetermined regions of a substrate in said chamber with a pattern of radiation intensity, said reflectors extending along a major portion of said longitudinal axis of said radiant energy sources, and the walls of said reflectors extending in a substantially perpendicular direction relative to said window, and said radiant energy sources and said reflectors positioned so that a portion of a predetermined region radiated by one radiant energy source overlaps a portion of a predetermined region radiated by an adjacent radiant energy source to provide a radiation intensity across the substrate that is dependent upon the intensity of adjacent radiant energy sources;
- and
- a cooling chamber having an upper wall and a lower wall joined together by another wall, said cooling chamber including a cooling passageway for the flow of a coolant therethrough, said reflectors extending into said cooling chamber.
2 more elements
An apparatus for the rapid thermal processing of a substrate, comprising:
- an evacuable chamber having a window;
- an assembly of radiant energy sources disposed outside of said chamber, said radiant energy sources having a central longitudinal axis that extends in a substantially perpendicular direction relative to said window and subsets of said radiant energy sources disposed at different radii of the assembly and each radiant energy source terminating in a common plane adjacent to said window;
- reflectors associated with said radiant energy sources to direct radiant energy through said window to radiate predetermined regions of a substrate in said chamber with a pattern of radiation intensity, said reflectors extending along a major portion of said longitudinal axis of said radiant energy sources and the walls of said reflectors extending in a substantially perpendicular direction relative to said window, and said radiant energy sources and said reflectors positioned so that a portion of one of said predetermined regions radiated by one of said radiant energy sources overlaps a portion of a predetermined region radiated by an adjacent one of said adjacent radiant energy sources to provide a radiation intensity across the substrate that is dependant upon the intensity of adjacent radiant energy sources;
- and
- a cooling passageway extending about said reflectors, said cooling passageway adapted to include a coolant to cool said reflectors.
2 more elements
Dependencies are inferred from the claim text.