Method and apparatus for determining a location on a surface of an object
AssigneeNova Measuring Instruments Ltd.
InventorDan Eylon
Life of this patent
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Abstract
A method is proposed for determining a location on an object and for positioning an object, such as a silicon wafer, which has an array of generally perpendicular grid lines on its surface and a plurality of directional features. The method determines the directions of the grid lines relative to the direction of a reference coordinate system, detects a grid junction and detects a direction of one of the plurality of directional features, thereby providing a location of the grid junction in the reference coordinate system. The object is positioned in accordance with the provided location of the grid junction.
Claims25
A method for determining a location on an object, said object having on its surface an array of generally perpendicular grid lines and plurality of directional features, the method comprising the steps of:
- a. determining the directions of said grid lines relative to the direction of a reference coordinate system;
- b. detecting a grid junction, the distance of said grid junction from the geometrical center of said surface being known;
- and
- c. detecting a direction of one of said plurality of directional features, thereby providing a location of said grid junction in said reference coordinate system,
- wherein said step of determining includes, prior to said step of determining, a step of positioning said object on a support, the coordinate system of said support being said reference coordinate system, generally with the geometrical center of the surface coinciding with the origin of the support coordinate system, thereby assuring that said detected grid junction is one of the grid junctions adjacent to said geometrical center of said surface.
A method for determining a location on an object, said object having on its surface an array of generally perpendicular grid lines and plurality of directional features, the method comprising the steps of:
- a. determining the directions of said grid lines relative to the direction of a reference coordinate system;
- b. detecting a grid junction, the distance of said grid junction from the geometrical center of said surface being known;
- and
- c. detecting a direction of one of said plurality of directional features, thereby providing a location of said grid junction in said reference coordinate system,
- wherein said step of detecting said grid junction further comprises the steps of:
- i) moving in a direction coincident with one direction of said grid lines until a grid line extending perpendicular to the direction of movement is detected;
- and
- ii) moving along said detected grid line until a grid junction is detected.
A method for determining a location on an object, said object having on its surface an array of generally perpendicular grid lines and plurality of directional features, the method comprising the steps of:
- a. determining the directions of said grid lines relative to the direction of a reference coordinate system;
- b. detecting a grid junction, the distance of said grid junction from the geometrical center of said surface being known;
- and
- c. detecting a direction of one of said plurality of directional features, thereby providing a location of said grid junction in said reference coordinate system,
- wherein said directional feature is in said grid junction, and also including the step of moving to a different grid junction provided that said directional feature is not detected in said junction.
A method for positioning an object, said object having on its surface an array of generally perpendicular grid lines and a plurality of directional features, the method comprising the steps of:
- a. determining the directions of said grid lines relative to the direction of a reference coordinate system;
- b. detecting a grid junction, the distance of said grid junction from the geometrical center of said surface being known;
- c. detecting a direction of one of said plurality of directional features, thereby providing a location of said grid junction in said reference coordinate system;
- and
- d. positioning said object in accordance with said provided location of said grid junction.
Dependencies are inferred from the claim text.