Carrier head design for a chemical mechanical polishing apparatus
AssigneeApplied Materials, Inc.
InventorsMichael T. Sherwood, Harry Q. Lee, Norm Shendon, Semyon Spektor
Life of this patent
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Abstract
A carrier uses multiple bellows to form two pressure chambers between the housing and carrier base and retaining ring assembly. By pressurizing the first chamber, an even load can be applied across the substrate. By pressurizing the second chamber, the retaining ring can pressed against the polishing pad. The bellows allow the carrier base to pivot with respect to the housing, but the downward force is evenly applied to the substrate through the first pressure chamber. Torque is transferred from the carrier housing to the carrier base through the bellows.
Claims8
A carrier head for chemical mechanical polishing, comprising:
- a housing connectable to a drive shaft to rotate with said drive shaft;
- a base to hold a substrate against a polishing pad;
- a retaining ring surrounding said base to hold said substrate beneath said base;
- a plurality of bellows connecting said base to said housing to form a first chamber therebetween and connecting said retaining ring to said housing to form a second chamber therebetween.
An apparatus for use in chemical mechanical polishing, comprising:
- a housing connectable to a drive shaft to rotate with said drive shaft about a first axis;
- a base having a surface to hold a substrate against a polishing pad;
- a retaining ring surrounding said base and having a projection to hold said substrate beneath said base;
- a plurality of bellows connecting said base to said housing to form a first chamber therebetween and connecting said retaining ring to said housing to form a second chamber therebetween;
- a first pump to pressurize said first chamber to cause said surface of said base to press said substrate against said polishing pad;
- and
- a second pump to pressurize said second chamber to cause said projection to press against said polishing pad.
Dependencies are inferred from the claim text.