Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTakao Tohda, Hiroyuki Kado, Ichiro Tanahashi, Yoshio Manabe, Masaru Yoshida
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Abstract
The dynamic quantity sensor includes an electrically insulating substance layer and at least one pair of electrodes contacting the electrically insulating substance layer, wherein a plurality of conductive particles are dispersed in the electrically insulating substance layer so that a tunnel current flows when a voltage is applied between the at least one pair of electrodes, and a dynamic quantity relating to a distance between the conductive particles is detected based on the tunnel current.
Claims19
A dynamic quantity sensor comprising an electrically insulating substance layer and at least one pair of electrodes contacting the electrically insulating substance layer,
- wherein a plurality of conductive particles are dispersed in the electrically insulating substance layer so that a tunnel current flows when a voltage is applied between the at least one pair of electrodes, and a dynamic quantity relating to a distance between the conductive particles is detected based on the tunnel current.
A distortion resistance element comprising an electrically insulating substance layer and at least one pair of electrodes contacting the electrically insulating substance layer, for detecting a distortion arising in the electrically insulating substance layer based on a current flowing between the pair of electrodes,
- wherein a plurality of conductive particles are dispersed in the electrically insulating substance layer so that a tunnel current flows when a voltage is applied to the at least one pair of electrodes.
Dependencies are inferred from the claim text.