Method of forming fine ceramics structure

Abstract

A method of forming a fine ceramics structure having columns with a fine pattern of width and a high aspect ratio includes steps of charging a plastic mold with a ceramics slurry, solidifying the ceramics slurry, and thereafter removing the plastic mold. The plastic mold is removed by heating the plastic mold in a vacuum, employing laser ablation, employing plasma etching, or employing a solvent of low viscosity dissolving plastic mold. Especially, the plastic mold is made of acrylic, the ceramics structure is made of lead zirconate titanate, and the mold is removed by plasma etching in a gas environment of oxygen and freon. The resulting fine pattern ceramics structure may have columns with an aspect ratio of at least 10, and particularly a height of 100 .mu.m and a diameter of 10 .mu.m.

Dependencies are inferred from the claim text.