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US 5,676,866 AGranted
Apparatus for laser machining with a plurality of beams
AssigneesCarl-Zeiss Stiftung, Hewlett-Packard Company, Lambda Physik AG
InventorsJoachim Schulte in den Baumen, Robert Grub, Herbert Gross, Jurgen Schweizer, Hans-Jurgen Kahlert, Siegfrid Dippon, Wilhelm Tamm, Si-Ty Lam, Heinrich Endert
Life of this patent
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Abstract
An apparatus for laser machining by creating a plurality of discrete and separate beams which are sent to a deflecting device including a support and a plurality of individual elements that act independently and are individually controlled to machine different points on the workpiece simultaneously.
Claims27
A material machining arrangement for machining a surface of a workpiece, the arrangement comprising:
- supply means for supplying a plurality of discrete machining beams which are separate from each other;
- a deflecting device including a support and a plurality of individual elements mounted on said support for deflecting corresponding ones of said machining beams;
- each of said individual elements being mounted on said support so as to be changeable in position independently of each other;
- and,
- control means for controlling said individual elements to discretely change the respective positions thereof in at least one coordinate direction to simultaneously machine different points on said surface of said workpiece with corresponding ones of said machining beams.
2 more elements
Dependencies are inferred from the claim text.