Polishing apparatus provided with abrasive cloth
AssigneeFujitsu Limited
InventorNaoki Hiraoka
Life of this patent
Estimating the term…
Abstract
A polishing apparatus includes a table on which an abrasive cloth is removably applied and an abrasive cloth replacing unit for automatically replacing the abrasive cloth locating on the table with a new abrasive cloth. The replacing unit includes a cloth storage device for storing a plurality of unused abrasive cloths, an abrasive cloth carrier and an abrasive cloth applier. The cloth carrier picks up an abrasive cloth located on the table and carries it to a disposal site and then picks up a new abrasive cloth from the cloth storage device and carries it to the table. The cloth applier presses an abrasive cloth against the table.
Claims19
An apparatus for polishing a material to be treated by moving an abrasive cloth and said material relative to each other while said material is pressed against said abrasive cloth, said apparatus comprising:
- a table on which said abrasive cloth is removably applied;
- and
- an abrasive cloth replacing means for automatically replacing a worn abrasive cloth on said table with a new, unused abrasive cloth, wherein said abrasive cloth replacing means comprises an abrasive cloth carrier means for picking up said worn abrasive cloth on said table and carrying said worn abrasive cloth to a disposal site.
A unit for transporting abrasive cloths, comprising:
- an arm having a distal end and a proximal end;
- a shaft connected to said proximal end of said arm and extending in a direction perpendicular to said arm, said arm being movable together with said shaft around said shaft;
- an air cylinder means for moving said arm together with said shaft in said vertical direction, said air cylinder means including a rod connected to said shaft;
- a rotary cylinder means for rotating said arm together with said shaft around said shaft via said rod, said air cylinder means and said rotary cylinder means being located on a line extending from an axis of said shaft;
- and
- a suction plate attached to said distal end of said arm, for holding an abrasive cloth thereon using suction.
A unit for applying an abrasive cloth to a table, comprising:
- an arm having a distal end and a proximal end, said arm being movable in a vertical direction and pivotable in a horizontal direction on the proximal end;
- first drive means for vertically moving said arm;
- second drive means for pivoting said arm in the horizontal direction;
- a rotary plate rotatably provided at the distal end of said arm;
- third drive means for causing said rotary plate to be rotated;
- and
- pressing means, attached to said rotary plate, for pressing an abrasive cloth against said table.
An apparatus for polishing a material to be treated by moving an abrasive cloth and said material relative to each other while said material is pressed against the abrasive cloth, said apparatus comprising:
- a table on which said abrasive cloth is removably applied;
- and
- an abrasive cloth replacing unit including a abrasive cloth carrier and a abrasive cloth applier, said abrasive cloth carrier being adapted to pick up a new abrasive cloth from a cloth storage device, in which at least one unused abrasive cloth is stored, and to carry the new abrasive cloth to said table, said abrasive cloth applier being adapted to press said new abrasive cloth against said table.
An apparatus for polishing a material to be treated by moving an abrasive cloth and said material relative to each other while said material is pressed against the abrasive cloth, said apparatus comprising:
- a table on which said abrasive cloth is removably applied;
- an abrasive cloth replacing unit for automatically replacing the abrasive cloth on said table with a new abrasive cloth;
- and
- an abrasive cloth applier for pressing an abrasive cloth against said table.
Dependencies are inferred from the claim text.