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US 5,675,684 AGranted
Optical module having semiconductor elements fixedly mounted thereon with improved accuracy
AssigneeHitachi, Ltd.
InventorsToshinori Hirataka, Satoru Kikuchi
Life of this patent
Estimating the term…
Abstract
In order to position an optical semiconductor chip with high accuracy and without adjustment, a recess for controlling the displacement of the optical semiconductor chip is formed in a position in which the optical semiconductor chip on an optical element mounting substrate having an optical waveguide formed in the surface thereof is fixed.
Claims48
An optical module comprising:
- an optical element mounting substrate in which a groove is formed, an optical fiber fixedly mounted in said groove, an optical semiconductor element fixedly mounted in said optical element mounting substrate, and a recess for fixing said optical semiconductor element in a position in a surface of said optical element mounting substrate in which an end surface of an active layer of said optical semiconductor element and an end surface of said optical fiber are coupled optically, two dimensional alignment of said optical semiconductor element being made by means of sides of said recess.
An optical module comprising:
- a plurality of optical semiconductor elements fixedly mounted on an optical element mounting substrate, and recesses each formed in a position in which end surfaces of active layers of said plurality of optical semiconductor elements are optically coupled with each other, two dimensional, alignment of said optical semiconductor elements being made by means of sides of said recesses.
An optical module comprising:
- an optical element mounting substrate having an optical waveguide formed therein;
- an optical semiconductor element fixedly mounted in said optical element mounting substrate, said element having a first electrode pattern;
- and
- an recess, having a second electrode pattern, formed in said mounting substrate, said recess limiting two-dimensional deviation between said first electrode pattern and said second electrode pattern when said optical semiconductor element is fixedly mounted on said optical element mounting substrate, and limiting two-dimensional deviation of said element so that said element is in a position in a surface of said optical element mounting substrate to assure that an end surface of an active layer of said optical semiconductor element and an end surface of said optical waveguide are coupled optically.
1 more element
A method for fabricating an optical module, comprising the steps of:
- etching a recess in a surface of said optical element mounting platform, said recess having lateral dimensions larger than lateral dimensions of an optical semiconductor element;
- forming an electrode pattern at a bottom surface of said recess;
- placing solder bumps on an electrode pattern formed on a bottom surface of said optical semiconductor element;
- and
- placing said optical semiconductor element with said solder bumps into said recess so that the electrode pattern of said optical semiconductor element is fixed to the electrode pattern in said bottom surface of said recess by means of said solder bumps, walls of said recess limiting two-dimensional deviation between coupling of said first and second electrode patterns.
2 more elements
A method for fabricating an optical module, comprising the steps of:
- etching a groove in a surface of an optical element mounting platform;
- etching a recess in a surface of said optical element mounting platform, said recess being in communication with said groove and having lateral dimensions larger than lateral dimensions of an optical semiconductor element;
- and
- fixing said optical semiconductor element to a bottom surface of said recess by means of solder bumps, walls of said recess preventing two-dimensional deviation of said optical semiconductor element so that said optical semiconductor element resides in a position in said recess so that an end surface of an active layer of said optical semiconductor element and an end surface of an optical waveguide disposed in said groove are optically coupled.
1 more element
Dependencies are inferred from the claim text.