Using sputter coated glass to stabilize microstrip gas chambers
AssigneeThe Regents of the University of California
InventorWen G. Gong
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Abstract
By sputter coating a thin-layer of low-resistive, electronically-conductive glass on various substrates (including quartz and ceramics, thin-film Pestov glass), microstrip gas chambers (MSGC) of high gain stability, low leakage current, and a high rate capability can be fabricated. This design can make the choice of substrate less important, save the cost of ion-implantation, and use less glass material.
Claims11
An apparatus configuration comprising:
- an insulative substrate including a surface subject to charge build up,
- a thin layer of an electronically conductive glass containing iron in the form of iron oxide coating said surface subject to charge buildup,
- a set of alternating cathode and anode conductors on said surface, wherein said thin layer provides a bleed path for continuous dissipation of electrical charge acquired by the surface, substantially without distorting the electrical signals being measured by the cathode and anode conductors.
An apparatus configuration comprising:
- an insulative substrate including a surface subject to charge build up,
- a thin layer of an electronically conductive glass which has been sputter deposited on said surface subject to charge buildup,
- a set of alternating cathode and anode conductors on said surface, wherein said thin layer provides a bleed path for continuous dissipation of electrical charge acquired by the surface, substantially without distorting the electrical signals being measured by the cathode and anode conductors.
A method of nearly eliminating the charge build-up on the surface of a substrate exposed to a charge source comprising the steps of:
- placing a substrate in a sputtering chamber:
- sputter depositing a thin layer of electronically conductive glass on the surface of the substrate;
- fabricating a set of anode and cathode conductors on the surface of the thin layer of electronically conductive glass;
- and
- providing a bleed path for continuous dissipation of electrical charge acquired by the surface through said thin layer of electronically conductive glass, substantially without distorting the electrical signals being measured by the cathode and anode conductors.
Dependencies are inferred from the claim text.