Scanning reflection electron diffraction microscope
AssigneeShimadzu Corporation
InventorTakao Marui
Life of this patent
Estimating the term…
Abstract
A scanning reflection electron diffraction microscope causes a primary electron beam from its electron gun to be reflectively diffracted from a sample and a diffraction pattern to be formed on a fluorescent screen. An optical lens reduces this diffraction pattern in size and forms its reduced image on a photoelectric surface, thereby producing an image-carrying electron beam. Deflected by a deflecting system including a deflecting coil and a condenser coil, the image-carrying electron beam is detected by an electron-multiplier such that a diffraction pattern is displayed on a cathode ray tube.
Claims14
A scanning reflection electron diffraction microscope comprising:
- electron beam source means for producing a primary electron beam;
- a fluorescent screen;
- pattern forming means for directing said primary electron beam to a target to thereby form a diffraction pattern on said fluorescent screen with reflectively diffracted beam from said target;
- photoelectric converter means for converting an optical image into an image-carrying electron beam;
- image reducing means for producing a reduced image on said photoelectric converter means by optically reducing a diffraction pattern formed on said fluorescent screen;
- a deflecting system for deflecting an electron beam emitted from said photoelectric converter means;
- an aperture screen having an aperture;
- and
- a detector for detecting electrons which have been deflected by said deflecting system and have passed through said aperture.
In a scanning reflection electron diffraction microscope which causes a primary electron beam from an electron beam source to be incident on a specified surface area of a sample at a specified angle of incidence, thereby forming a diffraction pattern on a fluorescent screen by reflectively diffracted beam from said specified surface area, and obtaining a scanning image by selectively using the intensities of light emitted from only a specified diffraction spot in said diffraction pattern on said fluorescent screen, the improvement wherein said microscope comprises:
- image reducing means for producing a reduced image by optically reducing a diffraction pattern formed on said fluorescent screen;
- a photoelectric conversion surface for converting an optically reduced diffraction pattern into an electronic image;
- a deflecting system for deflecting electrons from said photoelectric conversion surface;
- an aperture screen having an aperture for allowing electrons from said photoelectric conversion surface to pass therethrough;
- and
- a detector for detecting electrons which have passed through said aperture.
Dependencies are inferred from the claim text.