Scanning probe microscope having an optical system for enabling identification of the scanning region and sample observation during a scanning operation

A scanning probe microscope comprising:

• a probe having a minute aperture formed in a distal end thereof, the probe allowing light to propagate therethrough and being located close to a sample;
• moving means for relatively moving the probe across a surface of the sample;
• an observation optical system for optically observing the sample;
• a light source which emits a light beam for generating evanescent waves;
• beam irradiation means for irradiating the light beam on the sample so that the light beam is totally reflected by an optical interface of the sample, the beam irradiation means and the observation optical system sharing an objective located on a side of the sample opposite to the probe;
• separating means for separating the light beam and an observation light at a position where the observation light travels surrounded by the light beam;
• and
• light detecting means for detecting an intensity of light introduced into the probe through the aperture formed in the distal end of the probe.

A scanning probe microscope comprising:

• a probe having a minute aperture formed in a distal end thereof, the probe allowing light to propagate therethrough and being located close to a sample;
• moving means for relatively moving the probe across a surface of the sample;
• an observation optical system for optically observing the sample;
• a light source which emits a light beam for generating evanescent waves;
• beam introducing means for introducing the light beam into the probe so that light including the evanescent waves is emitted from the aperture in the distal end of the probe;
• and
• light detecting means for detecting at least one of;
• first light which is directed to a first region at an angle greater that a critical angle, and
• second light which is directed to a second region at an angle less than the critical angle,
• the first and second light being generated by light emitted from the aperture of the distal end of the probe,
• the first region excluding an area occupied by a dividing mirror and the second region including an area occupied by the dividing mirror, wherein the area occupied by the dividing mirror has an axis coincident with the probe axis and the critical angle being the smallest angle at which the evanescent waves are converted into propagating light;
• said observation optical system and said light detecting means sharing an objective located on a side of the sample opposite to the probe.