Method of synthesizing diamond-like carbon thin films
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTsutomu Mitani, Hirokazu Nakaue, Hideo Kurokawa
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Abstract
A method for synthesizing a hard diamond-like thin film on a rotating substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by a factor of 10 or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to a mesh-shaped internal electrode provided in the first vacuum vessel.
Claims2
A method of synthesizing a diamond-like carbon film having a Knoop hardness of 3000-3100 on a rotating substrate by self-biasing, comprising the steps of:
- generating a plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate, which is AC self-biased, is provided in a second vacuum vessel maintained at a lower pressure than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate;
- the pressure in the second vacuum vessel being lower than the pressure in the first vessel by a factor of 10 or more, and
- irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel an AC power, which is used for generating the plasma and a self-biasing voltage, is being applied to a mesh-shaped internal electrode provided in the first vacuum vessel and the substrate is set to ground potential.
Dependencies are inferred from the claim text.