Multiplexed laser interferometer for non-dispersed spectrum detection in a dynamic flying height tester
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InventorsTod L. Erickson, John P. Lauer
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AssigneePhase Metrics
InventorsTod L. Erickson, John P. Lauer
Estimating the term…
A preferred embodiment of the present invention comprises two laser sources of different frequency monochromatic light that are time-multiplexed through a beam combiner to produce composite beams that are steered to a gap between a slider and a disk. A reflected light that includes an interference pattern is then directed to an aperture plate that permits a spot of light to be directly detected by a photodiode which reads the intensity. Measurements of the intensity are taken at respective time-points to sample each laser source, and the measured intensities are compared to determine the slider to disk spacing. Since different frequency light will have different intensity for the same spacing, integer ambiguities can be directly resolved. In an alternative embodiment, several photodiode detectors are included with a multi-aperture plate that permits the simultaneous assessment of disk-to-slider spacing at several points of the slider dictated by the placement of multiple composite laser beams and the respective apertures.
An improved flying height tester (10) including at least two different-wavelength laser diodes (44, 45) that are time multiplexed through an optical system (58, 60, 66, 68, 72, 74, 76) to a measurement gap and having a photodetector (24) for measuring the amplitude of light reflected from said measurement gap through a pin-hole to determine the dimension of said measurement gap by light interferometrics, the improvement comprising:
An improved flying height tester (10) including at least two different-wavelength laser diodes (44, 45) that are time multiplexed through an optical system (58, 60, 66, 68, 72, 74, 76) to a measurement gap and having a photodetector (24) for measuring the amplitude of light reflected from said measurement gap through a pin-hole to determine the dimension of said measurement gap by light interferometrics, the improvement comprising:
Dependencies are inferred from the claim text.