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US 5,672,821 AGranted
Laminar flow device
AssigneeMKS Japan, Inc.
InventorIsao Suzuki
Life of this patent
Estimating the term…
Abstract
A laminar flow device includes a plurality of disks and a plurality of spacers alternately stacked together. The plurality of disks are defined by first disks and second disks, each of the first disks having a hole formed through a central portion thereof, and each of the second disks having a plurality of holes formed through an outer peripheral portion thereof. The first disks and the second disks are alternately arranged with the spacer interposed between any two adjacent ones of the disks.
Claims5
A laminar flow device comprising:
- a plurality of disks and a plurality of spacers alternately stacked together;
- said plurality of disks being defined by first disks and second disks, each of said first disks having a hole formed through a central portion thereof, and each of said second disks having a plurality of holes formed through an outer peripheral portion thereof;
- said first disks and said second disks being alternately arranged with a respective said spacer being interposed between any two adjacent ones of said disks;
- each said spacer comprising a thin, narrow ring having an outer diameter the same as an outer diameter of said disks;
- and
- all said holes in said first disks and in said second disks being located inwardly of an inner periphery of each said ring.
3 more elements
A laminar flow device comprising:
- a plurality of disks and a plurality of spacers alternately stacked together;
- said plurality of disks being defined by first disks and second disks, each of said first disks having a hole formed through a central portion thereof, and each of said second disks having a plurality of notches of a generally semicircular shape formed in an outer peripheral edge thereof;
- said first disks and said second disks being alternately arranged with a respective said spacer being interposed between any two adjacent ones of said disks;
- each said spacer comprising a thin, narrow ring having an outer diameter the same as an outer diameter of said disks;
- and
- all said holes in said first disks and said notches in said second disks being located inwardly of an inner periphery of each said ring.
3 more elements
A laminar flow device comprising:
- a plurality of disks and a plurality of spacers alternately stacked together;
- said plurality of disks being defined by one kind of disk each having holes formed through an outer peripheral portion thereof, said holes in each said disk being circumferentially spaced from each other;
- said plurality of disks being stacked together with a respective said spacer being interposed between any two adjacent ones of said disks in such a manner that said holes in each of said disks are disposed out of alignment with said holes in an adjoining said disk;
- each said spacer comprising a thin, narrow ring having an outer diameter the same as an outer diameter of said disks;
- and
- all said holes in said disks being located inwardly of an inner periphery of each said ring.
3 more elements
A laminar flow device comprising:
- a plurality of disks and a plurality of spacers alternately stacked together;
- said plurality of disks being defined by a first disk, a second disk, and third disks, said first disk having a hole formed through a central portion thereof, said second disk having a plurality of holes formed through an outer peripheral portion thereof, and each of said third disks having a plurality of holes formed through an outer peripheral portion thereof and a hole formed through a central portion thereof;
- said first disk and said second disk defining inlet-side and outlet-side end faces of said laminar flow device, respectively;
- said third disks and said spacers being alternately arranged between said first and second disks;
- each said spacer comprising a thin, narrow ring having an outer diameter the same as an outer diameter of said disks;
- and
- all said holes in said first disk, said second disk and said third disks being located inwardly of an inner periphery of each said ring.
4 more elements
A laminar flow device comprising:
- a plurality of disks and a plurality of spacers alternately stacked together;
- each of said disks having a predetermined pattern of holes formed therethrough;
- said holes in each of said disks being disposed out of registry with said holes in a said disk disposed adjacent thereto;
- each said spacer comprising a thin, narrow ring having an outer diameter the same as an outer diameter of said disks;
- and
- all said holes in said disks being located inwardly of an inner periphery of each said ring.
3 more elements
Dependencies are inferred from the claim text.