Process for fabricating a superconducting circuit
AssigneeSumitomo Electric Industries, Ltd.
InventorsTakao Nakamura, Hiroshi Inada, Michitomo Iiyama
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Abstract
A superconducting circuit having patterned superconducting wiring lines. Each wiring line consists of at least one portion (2') of the thin film (2) of an oxide superconductor deposited on a substrate (1). The portion (2') has a predetermined crystal orientation and the remaining portions (2") have a different crystal orientation or changed to non-superconductor. The superconducting circuit has a planar surface. In variations, two different wiring lines (21, 22) each having a different crystal orientation are produced at different portions of a thin film of oxide superconductor, so that superconducting current flow separately through two different portions in a common thin film.
Claims4
A process for fabricating a superconducting circuit having superconducting wiring lines each made of a thin film of oxide superconductor deposited on a substrate, said process comprising the steps of:
- depositing a first thin film of an oxide superconductor such that one of the a-axis and the c-axis of said first thin film is oriented perpendicularly to a surface of said substrate,
- removing predetermined areas of said first thin film to leave a first pattern of superconducting wiring lines,
- depositing a second thin film of a same oxide superconductor as said first thin film such that said second thin film becomes one of a c-axis oriented thin film and an a-axis oriented thin film and said second thin film has a orientation different from said first thin film on said surface of said substrate, and
- removing an upper part of said second thin film so as to expose said first pattern of superconducting wiring lines.
Dependencies are inferred from the claim text.