Membrane reparation and poer size reduction using interfacial ozone assisted chemical vapor deposition

Abstract

The instant invention is directed toward a process for enhancing the permselective properties, selectively sealing defects and pinholes, controllably altering the pore size and stabilizing the permselective properties of articles having apperatures therein comprising the steps of: simultaneously contacting an article having a first and second surface, said first and second surfaces being capable of passing ozone and silicon compounds therethrough and said first and second surfaces being oriented such that said silicon compounds and ozone can react across said first and second surfaces, with ozone on said first surface and a silicon compound on said second surface and wherein said contacting is conducted for a time and at a temperature and pressure sufficient to allow said ozone and said silicon compound to form a silicon oxide.

Dependencies are inferred from the claim text.