Method, dry multi-stage pump and plasmascrubber for converting reactive gases
AssigneeLeybold Aktiengesellschaft
InventorJan Visser
Life of this patent
Estimating the term…
Abstract
Method for converting reactive gases which are sucked in at a low inlet pressure and are expelled at a higher outlet pressure by a dry multi-stage pump, in which method the reactive gases are physically and/or chemically converted into nonreactive components at a pressure situated between the inlet and outlet pressure, the conversion taking place, according to the invention, by means of gas discharge. The invention also relates to a dry multi-stage vacuum pump (3) and a plasma scrubber (4) which are particularly suitable for use in the method according to the invention.
Claims9
Method for treating reactive gases passing through a single dry multi-stage pump, comprising the steps of:
- converting the reactive gases into non-reactive components by a gas discharge in a reaction chamber comprising a collection tank detachably sealed to the side walls of the reaction chamber forming a gas discharge chamber with the side walls and top wall, the collecting tank being in open communication with the reaction chamber, and a plasma generator positioned within the gas discharge chamber, the reaction chamber positioned between two stages of the dry multi-stage pump;
- and
- collecting solid particles produced by the converting step in the collecting tank disposed below the reaction chamber.
A dry multi-stage vacuum pump, comprising:
- a plurality of pump stages;
- and
- a reaction chamber connected between two adjacent pump stages of the plurality of pump stages, the reaction chamber comprising
- side walls,
- a top wall connected to the side walls,
- a collection tank detachably sealed to the side walls of the reaction chamber forming a gas discharge chamber with the side walls and top wall, the collecting tank being in open communication with the reaction chamber,
- a plasma generator positioned within the gas discharge chamber,
- a tubular element extending from an upper portion of the reaction chamber towards the collecting tank,
- a first gas flow connection providing an opening in the top wall within the tubular element, and
- a second gas flow connection providing an opening on one of the outer walls outside the tubular element;
- wherein gas passing through the reaction chamber is forced through a plasma formed in the gas discharge chamber by the plasma generator so that gas passing between the first and second gas flow connections is changed in direction, and solid particles released in the gas discharge chamber, fall downwards into the collecting tank.
Dependencies are inferred from the claim text.