Back to results
US 5,672,258 AGranted
Impedance type humidity sensor with proton-conducting electrolyte
AssigneeRutgers, The State University of New Jersey
InventorsMartha Greenblatt, Shouhaa Feng, Kandalam Ramanujachary, Pavel Shuk
Life of this patent
Estimating the term…
Abstract
A humidity sensing device comprising a solid electrolyte evidencing proton conductivity includes HZr.sub.2 P.sub.3 O.sub.12 or a composite comprising HZr.sub.2 P.sub.3 O.sub.12 /ZrP.sub.2 O.sub.7. The humidity sensing device is operative over a temperature range from 350.degree.-600.degree. C. The humidity sensor is operated by an impedance-type cell.
Claims9
An impedance cell humidity sensor comprising:
- a substrate;
- heating means affixed to one side of the substrate;
- a pair of spaced apart electrodes affixed to the other side of the substrate;
- a film of humidity sensitive material comprising a composite of HZr.sub.2 P.sub.3 O.sub.12 and ZrP.sub.2 O.sub.7 applied over and interconnecting the electrodes;
- and
- a function generator for applying a low frequency across the sensor.
3 more elements
Dependencies are inferred from the claim text.