Method of producing a laminated electronic device
AssigneeMurata Manufacturing Co., Ltd.
InventorsNagato Omori, Yukio Hamaji, Yoshiaki Mori, Yukio Sakabe
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Abstract
A plurality of dielectric ceramic sheets having inner electrodes thereon are laminated and sintered. The ceramic sheets are made of a non-reducing dielectric material, and the inner electrodes are made of a base metal or a base metal alloy. After a binder removing step, the laminate is sintered in a mixed gas which contains either one or both of carbon dioxide with a purity of 99.9% or more and carbon monoxide with a purity of 99.9% or more as its main constituent and further contains hydrogen and oxygen with their densities regulated.
Claims7
A method of producing a laminated electronic device, comprising the steps of:
- laminating together ceramic green sheets having inner electrodes comprising a base metal thereon, wherein at least some of the green sheets are made from a sintered mixture of PbO, MgCO.sub.3, Nb.sub.2 O.sub.5, TiO.sub.2 and ZnO to form a laminate;
- sintering the laminate in a mixed gas which contains carbon dioxide with a purity of at least 99.9% and carbon monoxide with a purity of at least 99.9%, as its main constituents, and which further contains hydrogen and oxygen, and wherein a supply of at least one of the hydrogen and oxygen is regulated to control a density of oxygen in the mixed gas.
A method of producing a laminated electronic device comprising the steps of:
- laminating together ceramic green sheets having inner electrodes comprising a base metal thereon, wherein at least some of the green sheets are made of a non-reducing ceramic material to form a laminate;
- sintering the laminate in a mixed gas which contains carbon monoxide with a purity of at least 99.9%, as its main constituent, and which further contains hydrogen and oxygen, wherein a supply of at least one of the hydrogen and oxygen is regulated to control a density of oxygen in the mixed gas.
A method of producing a laminated electronic device, comprising the steps of:
- laminating together ceramic green sheets having inner electrodes comprising a base metal thereon, at least some of the ceramic sheets being made of a non-reducing ceramic material, to form a laminate;
- sintering the laminate at a temperature of 600.degree. C. or less in a mixed gas which contains at least one of carbon dioxide with a purity of at least 99.9% and carbon monoxide with a purity of at least 99.9%, as its main constituent, and which further contains hydrogen and oxygen, wherein a supply of at least one of the hydrogen and oxygen is regulated to control a density of oxygen in the mixed gas.
Dependencies are inferred from the claim text.