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US 5,672,208 AGranted
Plasma discharge apparatus
AssigneeSony Corporation
InventorTetsuya Morita
Life of this patent
Estimating the term…
Abstract
A plasma discharge apparatus formed with a plasma chamber in which discharge is carried out wherein use is made, as the discharge gas sealed in the plasma chamber, of a mixed gas represented by Ne.sub.100-x Ar.sub.x A.sub.y (wherein, A is Ar, Kr, and/or Xe, x is 10 to 30 percent by volume, and y is 1 to 10 percent by volume). Note that when Kr and Xe are included as A, it is preferable that the Kr be included in an amount of 1 to 5 percent by volume and the Xe in an amount of 1 to 5 percent by volume.
Claims12
A plasma discharge apparatus, comprising:
- a pair of substrates for forming a discharge space;
- and
- an ionizable gas sealed in the discharge space, said ionizable gas being a mixed gas comprising neon plus 10 to 30 percent by volume of an element selected from the group consisting of argon, krypton, and xenon, said mixed gas comprises neon plus 10 to 30 percent by volume of argon, 1 to 5 percent by volume of krypton, and 1 to 5 percent by volume of xenon.
A plasma addressed electro-optical apparatus comprising:
- a plasma cell where plasma discharge is performed;
- an ionizable gas sealed in the plasma cell, the ionizable gas being a mixed gas comprising neon plus 10 to 30 percent by volume of an element selected from the group consisting of argon, krypton, and xenon, said mixed gas comprises neon plus 10 to 30 percent by volume of argon, 1 to 5 percent by volume of krypton, and 1 to 5 percent by volume of xenon;
- and
- an electro-optical cell layered on said plasma cell and addressed by the plasma discharge.
1 more element
Dependencies are inferred from the claim text.