US 5,672,205 A · Coating apparatus

Abstract

According to the present invention, there is provided an coating apparatus including means for holding an object to be process, the object holding means rotating in a state in which the object is placed thereon, a ring-like cup situated on an outer side of the object holding means, processing solution supply means, provided above the object, for supplying a processing solution on a surface of the object, discharge means, provided underneath the ring-like cup, for discharging processing solution portions scattered around when the processing solution is supplied on the surface of the object as a waste solution, together with a gas, and storage means, connected to the discharge means, for storing the waste solution and the gas discharged from the discharge means, wherein the waste solution and the gas are separated from each other in the storage means.

Claims13

Dependent claims

A processing apparatus using a solution, comprising:

means for holding an object to be processed, said means rotating with the object placed thereon;
a ring-shaped cup situated at an outer side of said object holding means;
processing solution supply means provided above said object for supplying a processing solution on a surface of said object;
discharging means provided below said ring-shaped cup for discharging, as a waste solution, together with air in said cup, processing solution portions scattered around when said processing solution is supplied on the surface of said object;
and
storage means connected to said discharge means for storing said waste solution and said gas discharged from said discharge means and for separating said waste solution and said gas from each other therein.

3 more elements

A processing apparatus using a solution, comprising:

means for holding an object to be processed, said object holding means having drive means for rotating said object holding means with the object placed thereon;
a ring-shaped cup situated on an outer side of said object holding means;
processing solution supply means, provided above said object, for supplying a processing solution on a surface of said object;
clean air supply means for allowing clean air, a temperature of which is adjusted, to flow to said ring-like cup and a surrounding area thereof, in a down-flow manner;
means mounted so as to cover at least a part of an outer side surface of said drive means for substantially preventing transfer of heat from said drive means;
and
clean air guide means for allowing said cleaning air to flow from an outer side of said ring-shaped cup to an inner side of said ring-like cup through an underneath portion of said ring-like cup, so as to supply said cleaning air to a rear surface of the object placed on said object holding means.

4 more elements

Dependencies are inferred from the claim text.

Coating apparatus

Life of this patent

Coating apparatus

Life of this patent

Abstract

Claims13