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US 5,671,315 AGranted
Optical parts fixing apparatus and method of manufacturing the same
AssigneeFujitsu Limited
InventorsHaruhiko Tabuchi, Tsugio Kumai, Seimi Sasaki, Kazunori Miura
Life of this patent
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Abstract
In an optical parts fixing device of the present invention, a substrate has an extension groove formed on an optical fiber fixing groove and has a width wider than that of the optical fiber fixing groove, or a substrate has the third groove which crosses end portions, opposed to each other, of the first groove for fitting an optical fiber therein and the second groove for fitting an optical device therein.
Claims15
An optical parts fixing device comprising:
- a first substrate having thereon a first groove into which an optical fiber is fitted, and a second groove to fix the optical fiber by applying adhesive, the second groove being formed on part of the first groove, a width and a depth of the second groove being wider and deeper than those of the first groove so that the optical fiber is not in contact with the second groove;
- and
- a second substrate for pushing the optical fiber against the first groove.
A method of manufacturing an optical parts fixing device comprising the steps of:
- forming a first masking film on a principle face of a substrate;
- forming a first window as stripe-like shape at an optical fiber fitting location by patterning the first masking film and forming a second window spaced apart from the first window and ahead of the first window;
- forming a second masking film on the first window, the second window and the first masking film;
- forming a third window by patterning the second masking film to expose selectively the first window;
- forming a first groove by etching the substrate exposed from the second window and the third window;
- removing the second masking film selectively;
- forming a second groove to be fitted onto projections of an optical semiconductor device to have a depth shallower than that of the first groove by etching the substrate exposed through the second window;
- and
- forming a third groove mechanically on the substrate in the direction perpendicular to the first groove so as to contact with ends of the first groove and the second groove.
6 more elements
A method of manufacturing an optical parts fixing device comprising the steps of:
- forming a first masking film on a principle face of a substrate;
- forming a second windows at an optical semiconductor fitting location by patterning the first masking film;
- forming a second grooves by etching the substrate exposed from the second windows;
- removing a first masking film;
- forming the second masking film on a principle face of the substrate;
- forming a first stripe-like window spaced apart from the second grooves by patterning the second masking film;
- forming a first groove for fitting an optical fiber therein and having a depth deeper than that of the second grooves by etching the substrate exposed from the first window;
- and
- forming a third groove mechanically on the substrate in the direction perpendicular to the first groove so as to contact with ends of the first groove and the second grooves.
6 more elements
A method of manufacturing an optical parts fixing device comprising the steps of:
- forming a first groove for fitting an optical fiber therein on a principle face of a first substrate, and forming a second groove for fitting an optical semiconductor device therein and having a depth shallower than that of the first groove, and spaced apart from and ahead of the first groove;
- bonding one surface of a second substrate covered by a masking film to a principle face of the first substrate;
- removing the second substrate by grinding and etching the second substrate from the other surface side thereof so as to remain only the masking film on the principle face of the first substrate;
- removing the masking film above the second groove so as to expose the second groove;
- forming a insulating film on the bottom surface of the second groove, and forming metal patterns on the insulating film;
- removing the masking film above the first groove so as to expose the first groove;
- and
- forming a third groove mechanically on the first substrate in the direction perpendicular to the first groove so as to contact with ends of the first groove and the second grooves.
5 more elements
A method of manufacturing an optical parts fixing device comprising the steps of:
- forming a first groove as stripe-like shape for fitting an optical fiber therein on a principle face of a first substrate;
- bonding one surface of a second substrate covered by a masking film to the principle face of the first substrate;
- removing the second substrate by grinding and etching the second substrate from the other surface side thereof so as to remain only the masking film on the principle face of the first substrate;
- forming a second window ahead of the first groove and spaced apart from the first groove by patterning the masking film;
- forming a second grooves for fitting an optical semiconductor device therein and having a depth shallower than that of the first groove by etching the first substrate exposed from the second windows;
- forming a insulating film on a bottom surface of the second groove;
- forming metal pattern on the second groove through the insulating film by the photolithography method;
- removing the masking film above the first groove so as to expose the first groove;
- and
- forming a third groove on the first substrate in the direction perpendicular to the first groove so as to contact with ends of the first groove and the second grooves.
7 more elements
A method of manufacturing an optical parts fixing device comprising the steps of:
- forming a first groove as stripe-like shape for fitting an optical fiber therein on a principle face of a first substrate;
- bonding one surface of a second substrate covered by a masking film to the principle face of the first substrate;
- removing the second substrate by grinding and etching the second substrate from the other surface side thereof so as to remain only the masking film on the principle face of the first substrate;
- forming a plurality of second windows ahead of the first groove and spaced apart from the first groove by patterning the masking film;
- forming a plurality of grooves so as to form a projection-like stripe for fitting an optical semiconductor device with fitting-groove by fitting the fitting-groove on the projection-like stripe, the projection-like stripe being formed between a pair of the second grooves, the projection-like stripe having a straight and stripe shaped ridge;
- forming a insulating film on a bottom surface of the second groove;
- forming a metal pattern on the insulating film on a bottom surface of the second groove;
- removing the masking film above the first groove so as to expose the first groove;
- and
- forming a third groove on the first substrate in the direction perpendicular to the first groove so as to pass opposed ends of the first groove and the second grooves.
7 more elements
An optical parts fixing device comprising:
- a first substrate including a first groove extending in a first direction, and
- a second groove, deeper and wider than said first groove, overlapping said first groove and extending in the first direction;
- an optical fiber fitted in at least part of said first groove, extending in the first direction, and at least partially extending into said second groove;
- and
- adhesive coupling said optical fiber to the sides of said second groove.
2 more elements
Dependencies are inferred from the claim text.