Strained quantum well structure
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsTohru Takiguchi, Katsuhiko Goto
Life of this patent
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Abstract
A semiconductor device includes a substrate having a lattice constant and a stress compensation strained quantum well layer including compressively strained layers having a lattice constant larger than the lattice constant of the substrate and tensively strained layers having a lattice constant smaller than the lattice constant of the substrate which are alternatingly laminated on the substrate, wherein the average strain of the stress compensation strained quantum well layer is a positive quantity. Therefore, the critical thickness of the strained quantum well layer is increased so that the degree of freedom in designing the strained quantum well layer is increased, resulting in a semiconductor device with improved characteristics.
Claims3
A semiconductor device comprising:
- a substrate having a lattice constant a.sub.s ;
- and
- a stress compensation strained quantum well layer having an average strain .epsilon..sub.average and comprising a plurality of compressively strained layers, each compressively strained layer having a lattice constant a.sub.1 larger than a.sub.s and a thickness t.sub.1, to which a strain .epsilon..sub.1 (.vertline..epsilon..sub.1 .vertline.>0.001) that is equal to (a.sub.1 -a.sub.s)/a.sub.s is applied, and a plurality of tensively strained layers, each tensively strained layer having a lattice constant a.sub.2 smaller than a.sub.s and a thickness t.sub.2, to which a strain .epsilon..sub.2 (.vertline..epsilon..sub.2 .vertline.>0.001) that is equal to (a.sub.2 -a.sub.s)/a.sub.s is applied, said compressively strained layers and said tensively strained layers being alternatingly laminated on the substrate, wherein the average strain .epsilon..sub.average of the stress compensation strained quantum well layer that is equal to (.epsilon..sub.1 .multidot.t.sub.1 +.epsilon..sub.2 .multidot.t.sub.2)/(t.sub.1 +t.sub.2) is in a range from +0.2% to +0.6%.
Dependencies are inferred from the claim text.