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US 5,671,116 AGranted
Multilayered electrostatic chuck and method of manufacture thereof
AssigneeLam Research Corporation
InventorAnwar Husain
Life of this patent
Estimating the term…
Abstract
A ceramic electrostatic chucking device having electrostatic clamping electrodes suitable for clamping wafers and flat panel displays. The chucking device includes a top insulating layer, the clamping electrode, a second insulating layer, a first metallization layer for distributing power to one of the clamping electrodes, a third insulating layer, a second metallization layer for distributing power to the other clamping electrode, a fourth insulation layer, inner and outer heater electrodes, a fifth insulating layer, a third metallization layer for distributing power to the heater electrodes, and at least one additional insulating layer. The insulating layers include groups of electrically conductive feedthroughs for interconnecting the electrodes and metallization layers.
Claims29
A multilayered electrostatic chucking device, comprising:
- a first insulating layer of an electrically insulating ceramic material;
- a second insulating layer of an electrically insulating ceramic material;
- an electrostatic clamping electrode between the first and second insulating layers, the clamping electrode including first and second strips of electrically conductive material;
- a third insulating layer of electrically insulating ceramic material;
- and
- a heater electrode between the second and third insulating layers, the heater electrode including discrete inner and outer heater electrodes individually supplied with electrical power to provide for different heating effects.
3 more elements
A multilayered electrostatic chucking device, comprising:
- a first insulating layer of an electrically insulating ceramic material;
- a second insulating layer of an electrically insulating ceramic material;
- an electrostatic clamping electrode between the first and second insulating layers, the clamping electrode including first and second strips of electrically conductive material;
- a third insulating layer of electrically insulating ceramic material;
- a heater electrode between the second and third insulating layers;
- and
- a fourth insulating layer of electrically insulating ceramic material and a metallization layer on the fourth insulating layer, the metallization layer including a plurality of radially extending legs electrically connected to the clamping electrode.
4 more elements
A multilayered electrostatic chucking device, comprising:
- a first insulating layer of an electrically insulating ceramic material;
- a second insulating layer of electrically insulating ceramic material;
- an electrostatic clamping electrode between the first and second insulating layers, the clamping electrode including first and second strips of electrically conductive material;
- a first group of electrically conductive feedthroughs extending through the second insulating layer and in electrical contact with the first strip;
- and
- a second group of electrically conductive feedthroughs extending through the second insulating layer and in electrical contact with the second strip, the first group of feedthroughs including at least two feedthroughs separated from each other by a distance smaller than a width of the first strip and the second group of feedthroughs including at least two feedthroughs separated from each other by a distance smaller than a width of the second strip.
3 more elements
A multilayered electrostatic chucking device, comprising:
- a first insulating layer of an electrically insulating ceramic material;
- a second insulating layer of electrically insulating ceramic material;
- an electrostatic clamping electrode between the first and second insulating layers, the clamping electrode including first and second strips of electrically conductive material;
- a first group of electrically conductive feedthroughs extending through the second insulating layer and in electrical contact with the first strip;.
- a second group of electrically conductive feedthroughs extending through the second insulating layer and in electrical contact with the second strip;
- and
- a third insulating layer of electrically insulating ceramic material and a first metallization layer on the third insulating layer, the first metallization layer including a plurality of radially extending legs electrically connected to the second strip by the second group of feedthroughs in the second insulating layer.
4 more elements
A method of making a ceramic electrostatic chuck comprising steps of:
- providing a first metallization layer on a top side of a first insulating layer, the first insulating layer comprising electrically insulating ceramic material in a green state having first and second groups of electrically conductive feedthroughs extending therethrough, the metallization layer comprising an electrostaic clamping electrode pattern of first and second strips of electrically conductive material;
- providing a second metallization layer on a top side of a second insulating layer, the second insulating layer comprising electrically insulating ceramic material in green state having a third groups of electrically conductive feedthroughs extending therethrough, the second metallization layer comprising a power distributing electrode pattern of electrically conductive material;
- assembling the second insulating layer on a bottom side of the first insulating layer;
- and
- cofiring the first and second insulating layers and forming a sintered body with the first and third groups of feedthroughs in electrical contact with the first strip and the second group of feedthroughs in electrical contact with the second strip, the first group of feedthroughs including at least two feedthroughs separated from each other by a distance smaller than a width of the first strip and the second group of feedthroughs including at least two feedthroughs separated from each other by a distance smaller than a width of the second strip.
2 more elements
A method of making a ceramic electrostatic chuck comprising steps of:
- providing a first metallization layer on a top side of a first insulating layer, the first insulating layer comprising electrically insulating ceramic material in a green state having first and second groups of electrically conductive feedthroughs extending. therethrough, the metallization layer comprising an electrostatic clamping electrode pattern of first and second strips of electrically conductive material;
- providing a second metallization layer on a top side of a second insulating layer, the second insulating layer comprising electrically insulating ceramic material in a green state having a third group electrically conductive feedthroughs extending therethrough, the second metallization layer comprising a power distributing electrode pattern of electrically conductive material, the power distributing electrode pattern comprising the second metallization layer including a plurality of radially extending legs;
- assembling the second insulating layer on a bottom side of the first insulating layer;
- providing a third metallization layer on a top side of a thrid insulating layer, the third insulating layer comprising electrically insulating ceramic material in a green state, the third metallization layer comprising a second power distribution electrode pattern of electrically conductive material, and assembling the third insulating layer on a bottom side of the second insulating layer;
- and
- cofiring the first, second and third insulating layers and forming a sintered body with the first and third groups of feedthroughs in electrical contact with the first strip and the second group feedthroughs in electrical contact with the second strip.
3 more elements
A method of making a ceramic electrostatic chuck comprising steps of:
- providing a first metallization layer on a top side of a first insulating layer, the first insulating layer comprising electrically insulating ceramic material in a green state having first and second groups of electrically conductive feedthroughs extending therethrough, the metallization layer comprising an electrostatic clamping electrode pattern of first and second strips of electrically conductive material;
- providing a second metallization layer on a top side of a second insulating layer, the second insulating layer comprising electrically insulating ceramic material in a green state having a third group of electrically conductive feedthroughs extending therethrough, the second metallization layer comprising a power distributing electrode pattern of electrically conductive material, the power distributing electrode pattern comprising the second metallization layer including a plurality of radially extending legs,
- assembling the second insulating layer on a bottom side of the first insulating layer;
- providing a third metallization layer on a top side of a third insulating layer, the third insulating layer comprising electrically insulating ceramic material in a green state, the third metallization layer comprising a second power distribution electrode pattern of electrically conductive material, the second power distributing electrode pattern including a plurality of radially extending legs;
- assembling the third insulating layer on a bottom side of the second insulating layer;
- providing a fourth metallization layer on a top side of a fourth insulating layer, the fourth insulating layer comprising electrically insulating ceramic material in a green state, the fourth metallization layer comprising a heater electrode pattern of electrically conductive material;
- assembling the fourth insulating layer on a bottom side of the third insulating layer;
- and
- cofiring the first, second third and fourth insulating layers and forming a sintered body with the first and third groups of feedthroughs in electrical contact with the first strip and the second group of feedthroughs in electrical contact with the second strip.
6 more elements
Dependencies are inferred from the claim text.