US 5,670,822 AGranted

CMOS process compatible self-alignment lateral bipolar junction transistor

AssigneeWinbond Electronics Corp.

InventorWen-Yueh Jang

Life of this patent

Estimating the term…

Loading patent…

Abstract

A self aligned lateral BJT is disclosed which has a lightly doped first region of a first conductivity type, e.g., P-type. A heavily doped poly region, of a second conductivity type, e.g., N-type, is provided on a portion of a surface of the first region. A heavily doped second region of the second conductivity type, is disposed in the first region below the poly region. An oxide region is provided on a portion of the first region surface adjacent to the poly region. A third region of the first conductivity type is disposed in the first region adjacent to the second region and below the oxide region. A heavily doped fourth region of the second conductivity type is disposed in the first region adjacent to the third region. The fabrication of the lateral BJT includes the step of forming a poly region on a portion of the first region. Then, the second region is formed by diffusing an impurity from the poly region into the first region. The third region is then formed adjacent to the second region. A portion of a surface of the third region near the second region is covered with the oxide region. Thereafter, the fourth region is formed adjacent to the third region by implanting ions into an uncovered surface portion of the third region.

Claims7

Dependent claims

A CMOS process compatible lateral bipolar junction transistor comprising:

a substrate,
a heavily doped region disposed on said substrate surface,
a first oxide spacer, disposed on said substrate surface laterally adjacent to a side of said heavily doped region, having a width extending in said lateral direction which is smaller than a photolithographic resolution of a process utilized to form said lateral bipolar transistor,
a collector region disposed in said substrate to a first depth below said heavily doped region by thermally diffusing impurities from said heavily doped region into said substrate in a vicinity of said collector region, said collector region comprising the same impurities as said heavily doped region,
a first base region disposed in said substrate laterally adjacent to said collector region and entirely below said first oxide spacer, said first base region having a lateral width that is equal to said lateral width of said first oxide spacer, and
a first emitter region disposed in said substrate having a second depth that is smaller than said first depth so as to increase a collection efficiency of said collector region, said first emitter region being laterally separated from said collector region by said first base region so that a base width of said lateral bipolar transistor equals said lateral width of said first base region,
wherein said collector, base and emitter regions are disposed in a well having the same conductivity type as said base region, but an opposite conductivity type as said emitter and collector regions and wherein a base of said bipolar junction transistor comprises said base region and said well.

4 more elements

A CMOS process compatible lateral bipolar junction transistor comprising:

a substrate,
a heavily doped region disposed on said substrate surface,
a first oxide spacer, disposed on said substrate surface laterally adjacent to a side of said heavily doped region, having a width extending in said lateral direction which is smaller than a photolithographic resolution of a process utilized to form said lateral bipolar transistor,
a collector region disposed in said substrate to a first depth below said heavily doped region by thermally diffusing impurities from said heavily doped region into said substrate in a vicinity of said collector region, said collector region comprising the same impurities as said heavily doped region,
a first base region disposed in said substrate laterally adjacent to said collector region and entirely below said first oxide spacer, said first base region having a lateral width that is equal to said lateral width of said first oxide spacer,
a first emitter region disposed in said substrate having a second depth that is smaller than said first depth so as to increase a collection efficiency of said collector region, said first emitter region being laterally separated from said collector region by said first base region so that a base width of said lateral bipolar transistor equals said lateral width of said first base region,
a second oxide spacer, disposed on said substrate surface on a laterally opposite side of said heavily doped region as said first oxide spacer, having a width extending in said lateral direction equal to said width of said first oxide spacer,
a second base region disposed in said substrate on a laterally opposite side of said collector region as said first base region and entirely below said second oxide spacer, said second base region having a lateral width that is equal to said lateral width of said second oxide spacer, and
a second emitter region disposed in said substrate to said second depth that is smaller than said first depth so as to increase a collection efficiency of said collector region, said second emitter region being laterally separated from said collector region by said second base region so that said base width of said lateral bipolar transistor equals said lateral width of said second base region.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 08/476,311Filed 7 Jun 1995 · division
Priority: 13 Apr 1994
Granted: 23 Sep 1997
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

H10D 84/401
Characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by…
H10D 10/60
Bipolar junction transistors [BJT]: lateral BJTs
H10D 62/184
Base regions of bipolar transistors, e.g. BJTs or IGBTs: of lateral BJTs
Y10S 148/01
Metal treatment: bipolar transistors-ion implantation