Monolithic-hybrid radiation detector/readout

A monolithic array of photodiodes and readout integrated circuits, comprising:

• a substrate comprised of a semiconductor material, said substrate having a first major surface and an oppositely disposed radiation receiving second major surface, said substrate having a first doped layer region adjacent to said first major surface that is doped with a dopant having a first type of electrical conductivity, said substrate having a plurality of counter-doped regions formed through said first doped layer region, each of said counter-doped regions being doped with a dopant having a second type of electrical conductivity, said substrate further having a second doped layer region adjacent to said second major surface that is doped with a dopant having the first type of electrical conductivity;
• wherein
• each of said plurality of counter-doped regions is conductively coupled to an associated readout integrated circuit that is formed within a bonded oxide semiconductor layer that overlies said first major surface and that is electrically insulated therefrom by an intervening layer of dielectric bonding oxide, each of said counter-doped regions and associated readout integrated circuits being associated with one photodiode unit cell having a photodiode comprised of the associated counter-doped region, a portion of said second doped layer region, and an intervening portion of said substrate;
• and wherein
• a portion of said first doped layer region that surrounds each of said counter-doped regions functions as a channel stop.