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US 5,670,782 AGranted
Scanning electron microscope and speciman observation method thereby
AssigneeHitachi, Ltd.
InventorMitsugu Sato
Life of this patent
Estimating the term…
Abstract
An axially symmetric electrode to allow passage of the primary electron beam is installed on the electron beam path inside the magnetic pole of the objective lens so that the primary electron beam passing through the objective lens has a higher energy than the final acceleration voltage. The specimen stage has a sensor to detect the angle of specimen inclination, and the voltage applied to the electrode is decreased or is reduced to zero by a control means if the angle of specimen inclination is too wide.
Claims23
A scanning electron microscope comprising:
- a. a specimen stage adapted to receive a specimen and including an inclining mechanism;
- b. a cathode emitting a primary electron beam;
- c. a condenser lens system reducing the diameter of said primary electron beam and directing said primary electron beam to a specimen on said stage;
- d. an electron beam deflecter providing two-dimensional scanning of said primary electron beam on said specimen;
- e. an objective lens having a magnetic pole;
- f. an inclination detector, detecting the inclination of said stage and providing an output signal indicative thereof;
- g. an axially symmetric electrode through which said primary electron beam passes, installed in the electron beam path inside said magnetic pole of said objective lens;
- and
- h. a first control which controls the voltage applied to said electrode as a function of the inclination of said specimen stage based on the output signal from said inclination detector.
6 more elements
A scanning electron microscope comprising:
- a. a specimen stage adapted to receive a specimen and including an inclining mechanism;
- b. a cathode emitting a primary electron beam;
- c. a condenser lens system reducing the diameter of said primary electron beam and directing said primary electron beam to a specimen on said stage;
- d. an electron beam deflecter providing two-dimensional scanning of said primary electron beam on said specimen;
- e. an objective lens having a magnetic pole;
- f. an inclination detector, detecting the inclination of said stage and providing an output signal indicative thereof;
- g. a plurality of axially symmetric electrodes installed in the electron beam path inside the magnetic pole of said objective lens, separated from one another in the axial direction, through which said primary electron beam passes;
- and
- h. a first control which controls the voltage applied to one of said plurality of electrodes located closer to the specimen as a function of the inclination of said specimen stage based on the output signal from said inclination detector;
- and
- i. a circuit applying a specified positive voltage to the ones of said plurality of electrodes located farther from the specimen.
8 more elements
A scanning electron microscope comprising:
- a. a specimen stage adapted to receive a specimen and including an inclining mechanism;
- b. a cathode emitting a primary electron beam;
- c. a condenser lens system reducing the diameter of said primary electron beam and directing said primary electron beam to a specimen on said stage;
- d. an electron beam deflecter providing two-dimensional scanning of said primary electron beam on said specimen;
- e. an objective lens having a magnetic pole;
- f. an inclination detector, detecting the inclination of said stage and providing an output signal indicative thereof;
- g. a plurality of axially symmetric electrodes installed in the electron beam path inside the magnetic pole of said objective lens, separated from one another in the axial direction through which said primary electron beam passes;
- and
- h. a first control which controls the voltage applied to the one of said plurality electrodes located closer to the specimen as a function of the inclination of said specimen stage based on the output signal from said inclination detector;
- and
- i. a second control controlling the voltage applied to the ones of said plurality of electrodes located farther from the specimen, as a function of the voltage applied to the ones of said plurality electrodes closer to said specimen.
8 more elements
A method of observing a specimen using a scanning electron microscope which includes a cathode generating a primary electron beam and an objective lens, with a magnetic pole, focusing the beam on a specimen, comprising:
- a. installing an axially symmetric electrode to allow passage of the primary electron beam in the electron beam path inside the magnetic pole of the objective lens;
- b. mounting the specimen on an inclinable specimen stage;
- c. applying a positive voltage to said electrode;
- d. scanning the primary electron beam which has passed through said electrode on said specimen;
- e. detecting secondary electrons emitted from the specimen using a secondary electron detector installed over said objective lens, thereby forming specimen images;
- and
- f. controlling the voltage applied to said electrode as a function of the inclination angle of said specimen stage.
4 more elements
A method of observing a specimen using a scanning electron microscope which includes a cathode generating a primary electron beam and an objective lens, with a magnetic pole, focusing the beam on a specimen, comprising:
- a. installing an axially symmetric electrode to allow passage of the primary electron beam in the electron beam path inside the magnetic pole of the objective lens;
- b. mounting the specimen on an inclinable specimen stage;
- c. applying a positive voltage to said electrode;
- d. scanning the primary electron beam which has passed through said electrode on said specimen;
- e. detecting the secondary electron emitted from the specimen using a secondary electron detector installed over said objective lens, thereby forming specimen images;
- and
- f. controlling the voltage applied to said electrode based on projections and depressions on the surface of the specimen.
4 more elements
Dependencies are inferred from the claim text.