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US 5,670,376 AGranted
Methodology for monitoring solvent quality
AssigneeLucent Technologies Inc.
InventorYaw Samuel Obeng
Life of this patent
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Abstract
The quality of solvents used in semiconductor manufacturing for removing photoresist or post halogen etch cleanup is monitored by measuring the conductivity of the solvents.
Claims5
A method of integrated circuit fabrication comprising:
- exposing a substrate to an organic solvent capable of carrying charged chemical species;
- measuring a conductivity of said organic solvent;
- and
- terminating said exposure of said substrate to said organic solvent when said conductivity reaches a predetermined value.
1 more element
Dependencies are inferred from the claim text.