An electrophotographic process comprising the steps of charging an electrophotographic light receiving member by means of a charging means of a contacting system or a non-contacting system, and conducting exposure, development, transferring, and cleaning in the named order, wherein said electrophotographic light receiving member has an outermost surface portion comprised of a non-single crystal material and a region (a) containing at least a metal element selected from the group consisting of metal elements belonging to groups 13, 14, 15 and 16 of the periodic table and a region (b) substantially not containing said metal element which are two-dimensionally distributed at said outermost surface of said light receiving layer.