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US 5,670,253 AGranted
Ceramic wafers and thin film magnetic heads
AssigneeMinnesota Mining and Manufacturing Company
InventorsRaymond C. Chiu, Robert G. Smith, Billy Lee Weaver
Life of this patent
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Abstract
A composite ceramic wafer including a beta silicon carbide layer. The composite ceramic wafer is useful for making thin film magnetic heads.
Claims20
A composite ceramic wafer comprising:
- (a) a metal oxide-based substrate having a first major surface and an average thickness in the range from about 0.5 to about 5 millimeters;
- and
- (b) a polycrystalline, beta silicon carbide layer on said first major surface, said beta silicon carbide layer having an average thickness in the range from about 3 to about 20 micrometers and an average surface roughness in the range from about 3 to about 25 Angstroms.
A thin film magnetic recording head comprising a metal oxide-based ceramic substrate having a first major surface with a polycrystalline, beta silicon carbide layer thereon, said silicon carbide layer having an average thickness in the range from about 3 to about 20 micrometers and a major surface with an average surface roughness in the range from about 3 to about 25 Angstroms;
- and thin film magnetic device circuitry on said major surface of said silicon carbide layer.
Dependencies are inferred from the claim text.