CVD method of providing a film of conjugated, substituted or unsubstituted poly(p-phenylene vinylene) on a substrate
AssigneeU.S. Philips Corporation
InventorsAemilianus G. J. Staring, Dirk J. Broer, Robert J. C. E. Demandt
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Abstract
A conjugated poly(p-phenylene vinylene) is manufactured by means of CVD and using simple monomers. Such a polymer is particularly adaptable for use as an active layer in electroluminescent devices, such as a light-emitting diode.
Claims20
A method of depositing a film of conjugated, substituted or unsubstituted poly(p-phenylene vinylene) on a substrate by chemical vapour deposition (CVD), characterized in that the polymer has the following formula ##STR3## wherein R is selected from the group formed by H, a C.sub.1 -C.sub.5 alkyl group or alkoxy group and CN, wherein m=1 to 4 and n=10 to 100,000,
- said method comprising the following successive steps:
- a. evaporating at least one monomeric compound of the formula ##STR4## wherein R.sup.1 and R.sup.2 represent a halogen atom and R and m have the above-mentioned meaning, in a first thermal zone at a temperature of from approximately 50.degree. C. to approximately 250.degree. C.,
- b. transporting the evaporated monomeric compound through a second thermal zone at a temperature of from approximately 500.degree. C. to approximately 900.degree. C., thereby forming a conjugated precursor,
- c. transporting the precursor of step b. to a third thermal zone in which the substrate is placed at a temperature below 500.degree. C., thereby forming the film of the polymer of formula (I) on the substrate.
A method of manufacturing a light-emitting diode, said method comprising:
- a) depositing a first, transparent, electroconductive layer on a substrate,
- b) providing said first layer with an active layer comprising at least one layer of a conjugated poly (p-phenylene vinylene) polymer of the formula ##STR5## wherein R is a member selected from the group consisting of H, C--C alkyl, C--C alkoxy and CN, wherein m=1 to 4 and n=10 to 100,000 by the following successive steps:
- 1) vaporizing at least one monomeric compound of the formula ##STR6## wherein R and R each represent a halogen and R and m have the above-mentioned meaning, in a first thermal zone at a temperature of from approximately 50.degree. C. to approximately 250.degree. C.,
- 2) transporting the vaporized monomeric compound through a second thermal zone at a temperature of from approximately 500.degree. C. to approximately 900.degree. C. to thereby form a conjugated precursor,
- 3) placing said substrate, provided with said first layer, in a third thermal zone in which said substrate is at a temperature of below 500.degree. C. and transporting said precursor to said third thermal zone to thereby form said active layer comprising at least one layer of polymer on said first layer,
- c) and providing a second electroconductive layer on said active layer.
Dependencies are inferred from the claim text.