Shape memory alloy lift pins for semiconductor processing equipment
AssigneeLam Research Corporation
InventorsPaul Kevin Shufflebotham, Christopher Griffin
Life of this patent
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Abstract
A lift pin arrangement for use in semiconductor processing apparatus wherein the lift pins are of a shape memory alloy. The lift pins exhibit superelasticity and/or shape memory effects which allows the lift pins to withstand substantial bending forces without permanent deformation thereof, and in the case where the lift pins become deformed it is possible to restraighten the lift pins simply by heating the lift pins to an appropriate temperature.
Claims25
A lift pin of a lift pin mechanism of a substrate processing apparatus, the lift pin consisting essentially of a shape memory alloy having a memorized configuration.
A process of treating a substrate in a substrate processing chamber, comprising:
- moving a substrate to be processed to a process position in a substrate processing chamber;
- raising a lifter having a plurality of lift pins to an upper position at which the substrate is supported on upper ends of the lift pins, each of the lift pins consisting essentially of a shape memory alloy having a memorized configuration;
- lowering the lifter to a lower position at which the substrate is supported on a substrate holder in the substrate processing chamber;
- treating the substrate with the process;
- raising the lifter to the upper position;
- and
- transferring the substrate out of the substrate processing chamber.
A process of transporting a substrate in a substrate processing apparatus, comprising:
- moving a substrate to be processed to a first process position in a first part of the substrate processing apparatus;
- raising a lifter having a plurality of lift pins to an upper position at which the substrate is supported on upper ends of the lift pins, each of the lift pins consisting essentially of a shape memory alloy having a memorized configuration;
- and
- moving the substrate to a second process position by lowering the lifter to a lower position at which the substrate is supported on a support surface.
Dependencies are inferred from the claim text.