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US 5,669,814 AGranted
Facility installation structure in clean room
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorTakefusa Takeda
Life of this patent
Estimating the term…
Abstract
A floor surface located directly under a facility is provided with an open space. A shut out member is formed to surround the open space. The shut out member extends from the bottom part of the facility to the floor surface. Connection members are placed in a space nearly completely closed by the shut out member and the bottom surface of the facility for connecting the facility with the main power system.
Claims8
An installation structure of a facility provided on the floor surface of a clean room, comprising:
- a plurality of first penetration holes provided at said floor surface around said facility for discharging air supplied to said clean room into a space under said floor surface;
- a second penetration hole having an opening area larger than that of said first penetration holes provided at said floor surface which is located directly under said facility;
- a shut out member extending from the bottom part of said facility onto said floor surface around said second penetration hole for preventing the air flowing toward said floor surface from entering said second penetration hole.
Dependencies are inferred from the claim text.