Optical element, production method of optical element, optical system, and optical apparatus
AssigneeNikon Corporation
InventorsKiyoto Mashima, Takashi Mori, Osamu Tanitsu
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AssigneeNikon Corporation
InventorsKiyoto Mashima, Takashi Mori, Osamu Tanitsu
Estimating the term…
An optical element for X-ray reflection according to the present invention is provided with a number of fine convex surfaces or concave surfaces regularly arranged on a substrate. Multilayer films reflecting X-rays are formed over the convex surfaces or concave surfaces. The convex surfaces or concave surfaces have such a shape that when X-rays enter each concave surface or convex surface, they are reflected with a certain diverging angle by the multilayer films and as a result that a plurality of secondary X-ray sources having the diverging angle are formed on a same plane located a certain distance apart from the concave surfaces or convex surfaces. By this, a number of secondary X-ray sources are formed to enable uniform irradiation of X-rays in a wide region.
An optical apparatus for illuminating an illuminated surface in an arcuate shape with electromagnetic waves emitted from a light source, comprising:
Dependencies are inferred from the claim text.