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US 5,669,133 AGranted
Method of making a magnetoresistive sensor
AssigneeSeagate Technology LLC
InventorPeter Kurt George
Life of this patent
Estimating the term…
Abstract
A magnetoresistive sensor having an improved read sensitivity function which remains relatively stable in response to variations in lapping. The magnetoresistive sensor includes a magnetoresistive element, a first electrical contact and a second electrical contact. During lapping, the boundaries between the electrical contacts and the magnetoresistive element, and therefore the active region of the magnetoresistive element, remain relatively constant in a lateral direction across the magnetoresistive sensor. This provides a relatively insensitive read sensitivity function within a predetermined lapping tolerance range.
Claims26
A method of making a magnetoresistive sensor, comprising:
- depositing a magnetoresistive element on a substrate, the magnetoresistive element having a magnetization vector and a lateral edge parallel to the magnetization vector extending in a lateral direction;
- patterning a first electrical contact adjacent and electrically coupling to the magnetoresistive element, the electrical contact including an inner lateral edge extending in a lateral direction and spaced apart in a vertical direction from the lateral edge of the magnetoresistive element;
- patterning a second electrical contact adjacent and electrically coupling to the magnetoresistive element and spaced apart in a lateral direction from the first electrical contact, such that the second electrical contact includes an outer lateral edge extending in the lateral direction and substantially colinear with the lateral edge of the magnetoresistive element, the second electrical contact including a vertical edge adjacent the outer lateral edge and proximal the first electrical contact;
- and
- lapping the lateral edge of the second electrical contact along the vertical edge to form an air bearing surface wherein the vertical edge of the second electrical contact remains stationary relative to the magnetoresistive element and the first electrical contact during lapping to form a magnetoresistive sensor.
2 more elements
A method for making a magnetoresistive sensor, comprising:
- depositing a magnetoresistive element on a substrate, the magnetoresistive element having a magnetization vector and a lateral edge parallel to the magnetization vector extending in a lateral direction;
- patterning a first electrical contact adjacent and electrically coupling to the magnetoresistive element, such that the electrical contact includes an inner lateral edge extending in a lateral direction and spaced apart in a vertical direction from the lateral edge of the magnetoresistive element;
- patterning a second electrical contact adjacent and electrically coupling to the magnetoresistive element and spaced apart in a lateral direction from the first electrical contact, such that the second electrical contact includes an outer lateral edge extending in the lateral direction and substantially colinear with the lateral edge of the magnetoresistive element, the second electrical contact including a vertical edge adjacent the outer lateral edge proximal the first electrical contact;
- and lapping the lateral edge of the second electrical contact along the vertical edge form an air bearing surface, wherein the vertical edge remains stationary relative to the magnetoresistive element during lapping, thereby forming the magnetoresistive sensor.
1 more element
A method of making a magnetoresistive sensor, comprising:
- depositing a magnetoresistive element on a substrate, the magnetoresistive element having a magnetization vector;
- patterning the magnetoresistive element to form a lip having a lateral edge;
- depositing and patterning a first electrical contact proximate and electrically coupling to the magnetoresistive element and remote from the lateral edge;
- depositing a second electrical contact proximate and electrically coupling to the magnetoresistive element, spaced apart from the first electrical contact and proximate the lateral edge wherein the magnetization vector crosses the magnetoresistive element from the second electrical contact to the first electrical contact;
- patterning an elbow in the second electrical contact wherein the elbow includes a vertical edge adjacent to a second edge, and wherein the vertical edge is substantially perpendicular to the lateral edge of the magnetoresistive element;
- and
- lapping the lateral edge of the magnetoresistive element and the second electrical contact along the vertical edge to form an air bearing surface wherein the vertical edge of the second electrical contact remains stationary relative the magnetoresistive element and the first electrical contact during lapping.
4 more elements
Dependencies are inferred from the claim text.